Description
VBF-1200X-V9 is a Verticalvacuum-sealed furnace.It equips an Ø200ר190×H425 mm quartz tube chamber with stainless steel flange and valves, which can achieve a vacuum of 10 -5 via Torr turbopump. It is designed for calcining or annealing semiconductor wafers (up to 8") under vacuum or various other gas atmospheres with a temperature of up to 1100°C.
SPECIFICATIONS
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Power |
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Heating Rate |
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Heating Elements |
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Quartz Tube & Effective Heating |
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Vacuum Flange ![]() |
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| Water Cooling |
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| Temperature Controller |
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Options |
The furnace can be modified into a faster heating and cooling furnace ( Pic. 3)
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Options |
You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately). |
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Compliance |
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Warning |
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