Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS

Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS

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Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS
  • Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS
  • Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS
  • Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS
Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS

Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS

SKU: gsl-3f-ss

Price: RFQ

Description

The GSL-3F-SS is designed to mix and deliver 3 different gases to the MTI CVD system at a low cost. The system is installed in a heavy-duty mobile cart where a tube furnace can be placed on top of it. The flow rates are adjustable via three float flow meters. 

Flow rate
  • A: 10 - 100 mL/min
  • B: 16 - 160 mL/min
  • C: 25 - 250 mL/min
  • Accuracy 4% F.S.)
Diaphragm Pressure Gauge 
  • -0.1 - 0.15 MPa (for gas mixing tank)
Gas Mixing Tank
  • SS304
Gas Schematics
  • Three needle valves for three gas inlets
  • One valve for a gas outlet
Gas Inlets and Outlets
  • 1/4" compression tube fittings
  • 12' length 1/4" PTFE pipe is included for immediate use
Dimenstions
  •  600 mm (L) x 600 mm (W) x 650 mm ( H)

Optionals

CVD & PECVD Furnace

Bubbler or evaporator for CVD 
        
Load limit 400 lbs