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Furnace structure
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Double-layer steel case with two cooling fans which ensure low surface temperature;
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Energy-saving high purity fibrous alumina insulation;
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Two fibrous ceramic tube blocks are included for blocking heat radiation from inside of the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
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Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum.
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| Rated voltage |
AC 208-240V Single Phase, 50/60 Hz (40A breaker required; Powder cord is included without plug) |
| Power consumption |
6 KW Max. |
| Heating elements |
Fe-Cr-Al Alloy doped by Mo |
Heating zone length
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| Fused Quartz Tube(Please choose from product option) |
Model: OTF-1200X-III-SHG-80-UL
80 O.D x 72 I.D x 1200 L (mm)
2" wafer Max. |
Model: OTF-1200X-III-SHG-4-UL
101 O.D x 92 I.D x 1200 L (mm)
3" wafer Max. |
Model: OTF-1200X-III-SHG-5-UL
130 O.D x 122 I.D x 1200 L (mm)
4" wafer Max. |
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Warning: The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 Mpa (absolute pressure) |
| Heating temperature |
- Max. Heating Temperature: 1200°C at flowing gas
- Continuous Heating Temperature: 1100°C at flowing gas
- Max. The heating temperature at Vaccum 1000°C
- Max. Heating Rate: 20°C/min
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Temperature Controllers
 
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- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- Three K-type thermocouples (one for each zone).
- RS485 Communications Port.
- Optional:
- The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost.
- The new version of the PC module is now compatible with Lab View 05/08/2014
- If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you order a computer laptop from us to avoid software installation problems. For more information please click here.
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European Temperature Controllers (optional upgrade)
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- 1 heating channel
- 1 programs of 8 or 24 segment
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
- Temperature Accuracy: ± 0.1ºC
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Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
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Vacuum Flange and Gauge
 
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Hinged type flanges are installed on both ends for easy sample loading/unloading;
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KF25D adapter installed on left flange with a precision digital vacuum gauge;
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SS needle valve with 1/4" pipe connector installed on right flange;
- Max. vacuum pressure can reach 10^-2 torr by mechanical pump and 10^-5 torr by the molecular pump;
- Optional: you may choose our molecular vacuum pump station for higher vacuum
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| Optional Part |
In order to build a complete CVD system, you may need a bubbler or gas delivery system, and a quartz wafer Carrier. . Please click the picture below to choose:
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| Laptop, software & WiFi Control(Optional) |
- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
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Labview Based Temperature Control System (MTS01)enables users to edit temperature profile, manage heat-treatment recipes, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
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| Compliance |
- CE certified
- NRTL or CSA certification is available upon request at extra cost
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Application Notes
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click here to choose a crucible
How to set up quartz tube and vacuum flange.
