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Stainless Steel Bubbler for CVD Liquid Precursors (150, 300, 600 or 1000ml) - BLSS

Stainless Steel Bubbler for CVD Liquid Precursors (150, 300, 600 or 1000ml) - BLSS

SKU: bl-ss

Price: RFQ

Specifications

In typical CVD processes, The Bubbler/Flash Evaporator is used for transporting chemical precursors and liquid sources in the vapor phase. Such a unit features two stainless steel needle valves with 1/4'' Tube Fittings allow carrier gas bubble through the liquid sources to enhance evaporation. Its leak-free 316 Stainless Steel vessel is able to withstand pressure up to 0.15Mpa @ 250°C. Please choose150mL, 300mL, 600mL and 1000 mL at product option bar. SPECIFICATIONS: Model# BL-SS-150 BL-SS-300 BL-SS-600 BL-SS-1000 Vessel Volume 150ml 300ml 600ml 1000ml Vessel Dimensions Inner: Φ45 x 84mm Outer: Φ51 x 104mm minimum liquid: 5 mm Inner: Φ45 x 180mm Outer: Φ51 x 187mm Inner: Φ70 x 154mm Outer: Φ76 x 200mm Inner: Φ70 x 258mm Outer: Φ76 x 300mm Tool KF-40 Quick Clamp Set KF-40 Quick Clamp Set C Spanner (78-85 mm) C Spanner (78-85 mm) Overall Dimensions 130x70x340mm (LxWxH) 130x70x440mm (LxWxH) 130x90x440mm (LxWx H) 130x90x540mm (LxWxH) Heating Capability Optional Heating Jacket EQ-HC-BL with built-in K-type thermocouple <150°C <150°C <150°C <150°C Vessel Material 316 Stainless Steel O-ring Fluoroelastomer (FKM) Sealing Material in Valve Soft PTFE Pressure Gauge -0.1 ~ 0.15 Mpa Max. Pressure 0.15Mpa Fittings Two SS needle valves with 1/4" Tube Fittings (PTFE frit as sealant) Application Notes The vessel should be cleaned after each use to prevent contaminants and bacteria build-up. Never heat the source liquid inside the vessel near its boiling point without opening valve You may order precision MFC to deliver vapor Please (click the picture below-right 3) to see our updated Liquid Vaporization Systems for CVD Please click to choose MTI CVD furnaces to build your own system.

Model#

BL-SS-150

BL-SS-300

BL-SS-600

BL-SS-1000

Vessel Volume  150ml 300ml 600ml  1000ml
Vessel Dimensions

Inner: Φ45 x 84mm
Outer: Φ51 x 104mm

minimum liquid: 5 mm 

Inner: Φ45 x 180mm 
Outer: Φ51 x 187mm
Inner: Φ70 x 154mm
Outer: Φ76 x 200mm
Inner: Φ70 x 258mm
Outer: Φ76 x 300mm
Tool

KF-40 Quick Clamp Set

KF-40 Quick Clamp Set

C Spanner (78-85 mm)

C Spanner (78-85 mm)

Overall Dimensions 130x70x340mm (LxWxH) 130x70x440mm (LxWxH) 130x90x440mm (LxWx H) 130x90x540mm (LxWxH)

Heating Capability

Optional Heating Jacket EQ-HC-BL with built-in K-type thermocouple
<150°C <150°C <150°C <150°C
Vessel Material 316 Stainless Steel
O-ring Fluoroelastomer (FKM)
Sealing Material in Valve Soft PTFE
Pressure Gauge -0.1 ~ 0.15 Mpa
Max. Pressure 0.15Mpa
Fittings Two SS needle valves with 1/4" Tube Fittings (PTFE frit as sealant)
Application Notes
  • The vessel should be cleaned after each use to prevent contaminants and bacteria build-up.
  • Never heat the source liquid inside the vessel near its boiling point without opening valve
  • You may order precision MFC to deliver vapor
  • Please (click the picture below-right 3) to see our updated Liquid Vaporization Systems for CVD
  • Please click to choose MTI CVD furnaces to build your own system.

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