Description
Features:
- Wafer boats are made of ultra-high purity quart (4N purity) for diffusion, oxidation, and annealing up to 1200oC.
- Each boat can only carry one size of wafers up to 25 pieces from 1" to 12" diameter by 0.5 mm thick separately.
- Please choose the correct size of the wafer from the product option bar.
| Size | Suitable MTI Tubes | ||||
| 1" |
OTF-1200X-S50 tube furnace (2" tube furnace) |
 1" wafer with a quartz boat |
 Mechanical Drawing |
 1" wafer with quartz boat can be placed into 2" tube |
 Place 1" wafer in the center of the furnace |
| 2" | OTF1200-3 tube furnace (3" tube furnace) |
2" wafer with a quartz boat |
 2" Quartz boat cross-section drawing (mm) - Length 180 mm |
2" wafer with quartz boat can be placed into 3" tube |
 Place 2" wafer in center of the furnace |
| 3" | OTF1200-4 tube furnace |
3" wafer with a quartz boat |
 3" Quartz boat cross-section drawing (mm) - length 180 mm |
3" wafer with quartz boat can be placed into 4" tube |
 Place 3" wafer in center of the furnace |
| 4" | OTF1200X5L tube furnace |
4" wafer with a quartz boat |
 4" Quartz boat cross-section drawing (mm) - length 180 mm |
4" wafer with quartz boat can be placed into 5" tube |
Place 4" wafer in center of the furnace |
| 4" x 4" |
OTF-1200X-5L, VBF-1200X-H8, OTF-1100X-8.5 tube furnaces |
 4"x4" square wafer with a quartz boat |
|
4" x 4" Square wafer with quartz boat can be placed into 8" tube |
|
| 6" |
GSL1100X-8.5-S-UL tube furnace, GSL1100X-8.5-III tube furnace, Compact Vacuum Chamber Furnace EQ-VBF-1200X |
 The dimension of 6" quartz boat |
 6" Quartz boat cross-section drawing (mm) - length 190 mm |
6" wafer with quartz boat can be placed into 7" tube |
 The 6" quart boat can fit in VBF1200 Muffle Furnace |
| 8" |
GSL1100X-11-III tube furnace |
 The dimension of 8" quartz boat |
 8" Quartz boat cross-section drawing (mm) - length 173 mm |
8" wafer with quartz boat can be placed into 8.5" tube |
|
| 12" |
 The dimension of 12" quartz boat |
 12" Quartz boat cross-section drawing (mm) - length 172 mm |
12" wafer with quartz boat |
 Place 12" wafer in center of the furnace |
