1200°C Two-Zone Tube Furnace w/ Optional Quartz Tube from 11" to 15" - OTF-1100X-II-XX

OTF-1100X-II furnace is a two-zone tube furnace with an optional quartz tube from OD 11" to 15" and vacuum flanges. Needle valves and, vacuum gauges are pre-installed for immediate use. The electrical actuator enables an easy & hassle-free lid opening. Three 30-segment programmable controllers are built-in with a K-type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1ºC accuracy. It has been widely used for CVD,  DVD processing for film growth of  two dimension materials ( TMD: layers of 2D transition metal dichalcogenide )

SPECIFICATIONS 

Furnace structure	Double-layer steel casing with air cooling.  The surface temperature of the case is < 70°C. Refractory fibrous alumina insulation liner for maximum energy saving. Heating element: NiCrAl Resistance Wire Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.   Hinged-type flange with water cold for sample loading at ease This furnace can be used as an annealing or diffusion furnace for 8" wafers ( 11"tube) or 12" wafers (15" tube)  The electrical lid actuator provides easy & hassle-free lid opening       Structure schematic 11" or 15" ceramic blocks Holding a 12" wafer Electrical Lid Actuator
Heating zone	Two zones: 450 mm + 450 mm  ( 900 mm in total) Constant temperature zone length: 500 mm (if three zones are in the same temperature within +/- 5°C) Cross-section Temperature tolerance +/- 5°C
Working temperature	Max heating temperature:      1200°C  Max heating & cooling rate:     10°C/min SiC heating elements, a total of 36 pcs
Temperature control	Three digital controllers with PID/self-tuning functions and 30 segments programmable. Thermocouple: three K-type thermocouples (one for each zone) Control accuracy: +/- 1°C Software for PC control is available as optional ( click the picture on the left to order )
Eurotherm Controllers (optional)	Temperature Accuracy:  ±  0.1ºC 1 heating zone per controller 1 program of 8 or 24 segment Alarm Relay: Form 'A' and Form ‘C’ built-in  Digital Communications: RS485 with software
Laptop & software (Optional)	Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Labview Based Temperature Control System (MTS01) is available to enable the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
Fused quartz tube	11" OD or 15" O.D quartz tube with 71" Length is selectable from product option High purity quartz tube, please click the bottom left picture to view. Warning: quartz tube is fragile, please handle it with care. The warranty does not cover the broken tube by use
Vacuum sealing & Flange	A pair of stainless steel vacuum sealing flanges (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump. Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting. Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve is optional for easy connection to KF40 bellows and pumps. One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
Options	The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost. The complete calibration kit includes One 48"L ( 1/4"OD) K-type calibration thermocouple One Omega temperature calibrator 5 feet long thermocouple power extension wire You may consider ordering turbopump for hi-vacuum up to 10-5 torr ( click pic below right to order )  4'' ~ 8'' large size quartz boats We can make the furnace into a verticle upon request.
Rated Voltage	Three Phase, 208V AC, 50/60 Hz   3 phase 380V is optional AWG 8# Power cord is included (without plug)
Power consumption	Max. 20KW (100A breaker required)
Compliance	CE Certified NRTL or NRTLCSA Certification is available upon request at the extra cost
Warning	Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bar  Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube