Description
OTF-1200X-III-R5-PECVD is a 1200°C plasma-enhanced three-zone rotary furnace for chemical vapor deposition (PECVD). It is designed for powder surface coating, e.g. core-shell particles, and powder surface cleaning. With the automatic powder feeding and collection system, it can simulate the powder coating manufacturing process on lab-scale equipment. It can also be used as plasma cleaning for powder
Features
- Plasma-enhanced CVD with 13.56 MHz RF power supply
- Three-zone rotary furnace with a heating length of 600 mm
- Tumbling volume: 5000 ml. Effective volume @ 20-25%
- 2-liter stainless steel powder feeding and collection system
- Gas mixers with 4-channel MFCs
- Optional PC and touchscreen remote control
SPECIFICATIONS:
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Power
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3-zone Rotary Furnace |
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Rotary Tube and Flange
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Powder Feeder and Collection Tank
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Laptop, software Control (Optional)
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Compliance
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