Specifications
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Function |
Two Channels |
Three Channels |
Four Channels |
Customized Four to Nine Channels |
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Computerized Note: Other range MFC can be customized at extra cost upon request |
Controlling Range:
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Controlling Range:
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Controlling Range:
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Select Range from below to make Customized 4 to 9 Channels:
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| Accuracy, linearity, and repeatability | Accuracy: ±1.5%FS Linearity: ±1%FS Repeatability: ±0.2%FS |
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| Working Temp and Pressure | Working Temp. : 5~45 ºC Max. Pressure: 3x106 Pa |
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Working Voltage |
AC 110 - 240V Single phase 50/60Hz | ||||
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Power |
23W | ||||
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| Mechanical Pressure Gauge | Measurement Range: -0.1~0.15 MPa | ||||
| Needle Valve | 316 Stainless Steel | ||||
| Gas Pipeline |
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| Gas Mixing Tank | Φ80X120mm | ||||
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Stop Valve & Fittings |
316 stainless steel needle valve, Φ1/4” Swagelok Tube Fitting |
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| Dimensions | 600mm(L) x 855mm(W) x 700mm(H) | ||||
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Compliance
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Warranty
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One year limited with lifetime support | ||||
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Oxygen Monitoring
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Application Note
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Related Products
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CVD & PECVD Furnace Click picture below to order bubbler or evaporator for CVD |
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