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- Double shell casing with cooling fans
- High-purity alumina fibrous insulation for max. energy saving
- Split cover enables faster cooling and easy operation
- A hydrogen detector and solenoid valve are included for safety measures
- The liquid evaporator is heatable with temperature control to produce a mixing of hydrogen and liquid vapor.
- The hydrogen gas furnace must be placed under a fume hood which is not included.
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Power
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4 KW Max |
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Input Voltage
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AC 208 - 240V single phase (30A air breaker is required) |
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Heating Elements
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FeCr27Al7MO2 |
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Heating Zone Length
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Two heating zones: 8" (200 mm) length of each zone, 16" (400 mm) total
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Constant temperature zone: 150 mm within +/- 1oC when two zones are set at same temperature
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Temperature Uniformity
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+/- 1°C in heating Zone |
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Continuous Working Temperature
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1100°C |
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Recommended Heating Rate
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10°C /min |
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Processing Tube and Flanges
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High purity quartz tube: Φ80 (OD)×Φ74 (ID) ×1000 L, mm
- Vacuum flange: SS304 flanges are included to achieve vacuum up to 10^ - 5 torr by turbopump.
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Temperature Controllers 
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- Two digital temperature controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
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Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 port is installed in front of the panel for PC connection
- PC control module and software are included for computerized temperature control. Click here to review detailed information.
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Float Flow Meter
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- Two flowmeters 50-500ml/min are built on the gas inlets.
- One flowmeter is for Hydrogen delivery while the other is mainly for CVD gas with liquid vapor
- The extra flowmeter is available upon request at extra cost.
- You may consider using our MFC gas delivery station 1 - 9 channel for more accurate gas control
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Bubbler/ Liquid Evaporator
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- Such a liquid evaporator is suitable for liquid sources and chemical precursors delivery in CVD processes.
- One stainless steel container is included with a capacity of 600 ml ( 80OD x 200H, mm)
- The container is inserted into a small cylindrical heater with thermal insulation
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The container can be heated up to 250°C and controlled by a programmable temperature controller.
- Two SS needle valves and one pressure gauge are built on the container (click the picture left for details)
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Humidity Monitor
( included)
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- One precision humidity monitor is connected to the processing tube flange with KF25 adaptor
- Measurement range : 0 - 100% RH with 1.5%FS accuracy, or -60º ~ +60º DP with +/-0.3º accuracy.
- Tips: You may adjust the evaporator's (water inside) temperature and H2 gas flow rate to achieve desired humidity level.
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Hydrogen Detector System
 (included)
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- Working Temperature Range: 40ºF to +149ºF (-40ºC to +65ºC)
- Alarm Point: H2 Limited Explosive Line 20% (20% LEL). Once detecting H2 gas beyond the point, it will shut off the inlet valve to the H2 automatically.
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Options for upgrading
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- Anti-corrosive capacitance Diaphragm Gauge to measure the vacuum pressure ( click pic 1 )
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Multi-channel gas mixer with a precision mass flow controller is also available. ( click pic 2 )
- A dry pump is highly recommended for LPCVD, especially if the carrier gas is flammable. (click pic. 3)
 Pic. 1  Pic. 2  Pic. 3
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| Warranty |
One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty).
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Compliance
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- CE Certified
- NRTL or CSA certification is available upon request at extra cost.
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Furnace Dimensions
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1400×600×1200mm |
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Product Net Weight
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100Kg
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