| Power |
|
| Frequency Range |
|
| Frequency Resolution |
|
| Measurement Speed |
- Up to 10 measurements per second
|
| Reference Frequency Stability |
|
| Thickness and Rate Resolution |
- +/- 0.037Å @tooling = 100%, density = 1.00 g/cm3, Z-ratio = 1.00, frequency = 6.0 MHz
|
| Display Resolution |
|
| Operating Temperature |
|
| Water Flow Requirement |
- Minimum water flow 150-200 cc/min, 30° C max
|
| Water Feedthrough |
- 1/8 in. (3.0 mm) O.D. tubing
|
| Standard Package |
- Sensor with the quartz holder is included.
- 6″ BNC Cable M/F is included
- SMA Female to Female Bulkhead Connector Adaptor is included (For MTI’s film deposition systems, feedthrough with SMA female (in the deposition chamber) to BNC female (outside chamber) adapter)
- Gold quartz crystals of one set (10 PCS) is included.
 |
 |
 |
 |
| Quartz holder |
6″ BNC-J3 Female to
SMA-J3 Female Cable |
SMA Bulkhead Adaptor |
Gold quartz crystals |
|
Quartz Crystals (Optional)
 |
| Alloy |
|
- Starting frequency: 6 MHz
- Crystal size: 14 mm Dia.
- Anchor electrode pattern for maximum crystal stability and life
- Gold and alloy electrode quartz crystals can be ordered at MTI (Click pictures below or select product options)
-
Choose the quartz crystal with the right electrode material for your application - gold, silver, alloy
- Recommend gold electrode crystals for most applications
- Silver electrode crystals work well for processes with high heat loads, such as sputtering
- Alloy electrode crystals are recommended for high-stress deposition, such as optical coating with dielectric materials and semiconductor processes with high-stress materials
|
| Operating System |
- Windows 8, Windows 7, Windows Vista, Windows XP, Windows 2000
|
| Software |
- STM-2 software is included (Download link is also available here)
-
STM-2 LabVIEW™ Application Software is available here.
- An additional laptop ($699) with software pre-installed is highly recommended and can be ordered at MTI
 
|
| Installation |
|
| Compliance |
CE Certificated (Assembled in the USA) |
| Production Dimensions |
- Monitor Size: 114 mm L x 76 mm W x 25 mm H
- Quartz Holder: 325 mm L x 25 mm W x 15 mm H
|
| Monitor Weight |
|
| Warranty |
- One-year limited warranty with lifetime support
|
| Operation Instructions |
 |
Application Notes
|
- If you need to test the resistance of a coating of the electrode to cracking or detachment from a substrate, Please click to order Flexibility Tester.
- Feedthrough for TM106 Thickness Monitor is available to purchase. If you need customized feedthrough, please email us for more information.
-
 |
 |
 
|
 |
| Drawing |
FlexibilityTest |
Application for Sputtering Feedthrough |
|
