In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD

In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD

RM0.00 MYR
Skip to product information
In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD
  • In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD
In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD

In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD

SKU: tm106-ld

Price: RFQ

Description

 EQ-TM106-LD is a quartz crystal microbalance (QCM) for in-sit film thickness / deposition rate measurement. It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystal’s oscillating frequency. If the density of deposited material is known, the thickness can be determined to a high resolution of sub-Angstrom (0.037 Å for this equipment). SPECIFICATIONS: Power 5 VDC, 400 mA Frequency Range 6.0 to 5.0 MHz (fixed) Frequency Resolution +/- 0.03 Hz @ 6 MHz Measurement Speed Up to 10 measurements per second Reference Frequency Stability +/- 2 ppm Thickness and Rate Resolution +/- 0.037Å @tooling = 100%, density = 1.00 g/cm3, Z-ratio = 1.00, frequency = 6.0 MHz Display Resolution 0.1 Å Operating Temperature 0 to 50°C Water Flow Requirement Minimum water flow 150-200 cc/min, 30° C max Water Feedthrough 1/8 in. (3.0 mm) O.D. tubing Standard Package Sensor with the quartz holder is included. 6″ BNC Cable M/F is included SMA Female to Female Bulkhead Connector Adaptor is included (For MTI’s film deposition systems, feedthrough with SMA female (in the deposition chamber) to BNC female (outside chamber) adapter) Gold quartz crystals of one set (10 PCS) is included. Quartz holder 6″ BNC-J3 Female to SMA-J3 Female Cable SMA Bulkhead Adaptor Gold quartz crystals Quartz Crystals (Optional) Alloy Starting frequency: 6 MHz Crystal size: 14 mm Dia. Anchor electrode pattern for maximum crystal stability and life Gold and alloy electrode quartz crystals can be ordered at MTI (Click pictures below or select product options) Choose the quartz crystal with the right electrode material for your application - gold, silver, alloy Recommend gold electrode crystals for most applications Silver electrode crystals work well for processes with high heat loads, such as sputtering Alloy electrode crystals are recommended for high-stress deposition, such as optical coating with dielectric materials and semiconductor processes with high-stress materials Operating System Windows 8, Windows 7, Windows Vista, Windows XP, Windows 2000 Software STM-2 software is included (Download link is also available here ) STM-2 LabVIEW™ Application Software is available here. An additional laptop ($699) with software pre-installed is highly recommended and can be ordered at MTI Installation Compliance CE Certificated (Assembled in the USA) Production Dimensions Monitor Size: 114 mm L x 76 mm W x 25 mm H Quartz Holder: 325 mm L x 25 mm W x 15 mm H Monitor Weight 57 g Warranty One-year limited warranty with lifetime support Operation Instructions Application Notes If you need to test the resistance of a coating of the electrode to cracking or detachment from a substrate, Please click to order Flexibility Tester. Feedthrough for TM106 Thickness Monitor is available to purchase. If you need customized feedthrough, please email us for more information. Drawing FlexibilityTest Application for Sputtering Feedthrough LIST OF PARTS: No. Description Qty 1 STM-2 rate / thickness monitor 1 2 Software/monitor manual CD

Power
  • 5 VDC, 400 mA
Frequency Range
  • 6.0 to 5.0 MHz (fixed)
Frequency Resolution
  • +/- 0.03 Hz @ 6 MHz
Measurement Speed
  • Up to 10 measurements per second
Reference Frequency Stability
  • +/- 2 ppm
Thickness and Rate Resolution
  • +/- 0.037Å @tooling = 100%, density = 1.00 g/cm3, Z-ratio = 1.00, frequency = 6.0 MHz
Display Resolution
  • 0.1 Å 
Operating Temperature
  • 0 to 50°C
Water Flow Requirement
  • Minimum water flow 150-200 cc/min, 30° C max
Water Feedthrough
  • 1/8 in. (3.0 mm) O.D. tubing
Standard Package
  • Sensor with the quartz holder is included.
  • 6″ BNC Cable M/F is included
  • SMA Female to Female Bulkhead Connector Adaptor is included (For MTI’s film deposition systems, feedthrough with SMA female (in the deposition chamber) to BNC female (outside chamber) adapter)
  • Gold quartz crystals of one set (10 PCS) is included.
Quartz holder 6″ BNC-J3 Female to
SMA-J3 Female Cable		 SMA Bulkhead Adaptor Gold quartz crystals
Quartz Crystals (Optional)
Alloy
  • Starting frequency: 6 MHz
  • Crystal size: 14 mm Dia.
  • Anchor electrode pattern for maximum crystal stability and life
  • Gold and alloy electrode quartz crystals can be ordered at MTI (Click pictures below or select product options)
  • Choose the quartz crystal with the right electrode material for your application - gold, silver, alloy
    • Recommend gold electrode crystals for most applications
    • Silver electrode crystals work well for processes with high heat loads, such as sputtering
    • Alloy electrode crystals are recommended for high-stress deposition, such as optical coating with dielectric materials and semiconductor processes with high-stress materials 
Operating System
  • Windows 8, Windows 7, Windows Vista, Windows XP, Windows 2000
Software
  • STM-2 software is included (Download link is also available here)
  • STM-2 LabVIEW™ Application Software is available here.
  • An additional laptop ($699) with software pre-installed is highly recommended and can be ordered at MTI
Installation
Compliance  CE Certificated (Assembled in the USA)
Production Dimensions
  •  Monitor Size: 114 mm L x 76 mm W x 25 mm H
  • Quartz Holder: 325 mm L x 25 mm W x 15 mm H
Monitor Weight
  • 57 g
Warranty
  • One-year limited warranty with lifetime support
Operation Instructions
Application Notes
  • If you need to test the resistance of a coating of the electrode to cracking or detachment from a substrate, Please click to order Flexibility Tester.
  • Feedthrough for TM106 Thickness Monitor is available to purchase. If you need customized feedthrough, please email us for more information.
  • Drawing FlexibilityTest Application for Sputtering Feedthrough
,
Quartz holder 6″ BNC-J3 Female to
SMA-J3 Female Cable		 SMA Bulkhead Adaptor Gold quartz crystals
,
Alloy
,
Drawing FlexibilityTest Application for Sputtering Feedthrough
,
No. Description Qty
1 STM-2 rate / thickness monitor 1
2 Software/monitor manual CD