Furnace structure
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- Double-layer steel casing with air cooling. The surface temperature of the case is < 70°C.
- Refractory fibrous alumina insulation liner for maximum energy saving.
- Heating element: NiCrAl Resistance Wire
- Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.
- Hinged-type flange with water cold for sample loading at ease
- This furnace can be used as an annealing or diffusion furnace for 12" wafers and uses a quartz boat
- The electrical lid actuator provides easy & hassle-free lid opening
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Structure schematic
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15" ceramic blocks
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Holding 12" wafer |
Electrical Lid Actuator |
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Heating zone
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- Total heating zone length 900mm
- Three zones: 300 mm + 300 mm + 300mm ( 900 mm in total)
- Constant temperature zone length: 600 mm (if three zones are in the same temperature within +/- 5°C)
- Cross-section Temperature tolerance +/- 5°C
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Working temperature
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- Max heating temperature: 1200°C
- Max heating & cooling rate: 10°C/min
- SiC heating elements, a total of 36 pcs
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Temperature control
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Laptop, software (Optional)
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
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Labview Based Temperature Control System (MTS01) is available to enable the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
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Eurotherm Controllers (optional)
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- Temperature Accuracy: ± 0.1ºC
- One controller per heating zone
- 1 program of 8 or 24 segments per controller
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
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Fused quartz tube
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- 11"OD or 15" O.D quartz tube with 71" Length is selectable from product option
- High purity quartz tube, please click the bottom left picture to view.
- Warning: quartz tube is fragile, please handle it with care. The warranty does not cover the broken tube by use
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Vacuum sealing & Flange
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A pair of stainless steel vacuum sealing flanges (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.
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Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.
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- One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
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Options
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The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost. The complete calibration kit includes
- You may consider ordering turbopump for hi-vacuum up to 10-5 torr ( click pic below right to order )
- 4'' ~ 8'' large size quartz boats
- We can make the furnace into a verticle upon request.
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Rated Voltage
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- Three Phase, 208V AC, 50/60 Hz 3 phase 380V is optional
- Max. 20KW (70A breaker required)
- AWG 6# Power cord is included (without plug)
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Note
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar
- Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
- In order to obtain accurate temperature inside the tube furnace, calibration of temperature is required before use, please click here to learn
- How to set up a ceramic tube and vacuum flange for an MTI Tube furnace
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