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OTF-1500X-UL-2 |
OTF-1500X-UL-3 |
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Click the link above to order a spare tube
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Click the link above to order a spare tube
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Furnace Structure
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Double-layer steel casing with air cooling to keep furnace surface temperature lower than 60°C.
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High-purity fibrous alumina insulation for Max. Energy-saving.
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The special refractory coating on the inner increases furnace life.
- Two pairs of fibrous ceramic tube blocks are included to block heat radiation from inside the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
- Split cover with Interlock protection, cut the power if the door opens during the furnace heating process.
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| Input voltage |
208 - 240VAC SINGLE PHASE, 50/60Hz
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| Power |
6.0 KW (40A Breaker Required)
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Heating temperature

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- Max. heating temperature: 1500°C (< 1hr)
- Continuously heating temperature: 1400°C
- Heating rate 10°C /min Max. and cooling rate < 10 °C /min Max. for alumina tube
- Note: if using alumina tube: Heating rate: 10°C /min Max. and cooling rate < 5 °C /min Max.
- The S-type thermal couple is included.
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16 pcs SiC rod as heating elements (1500 grade) Pls click pic left to order spare or replacement
- Notice: Customers will install SiC rods on-site by themselves as instruction manual because they are easy to damage during shipping.
- Please notice, for the SIC heating element, it is a consumable part, and not covered by warranty, and usually, its service life is one year.
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Heating zone & Constant Temperature Zone |
- Total heating zone length: 390mm
- Constant temperature zone: 150 mm (+/-2°C)

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Temperature Controller
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FA-YD518P-AG temperature controller included.
- Proportional–integral–derivative control (PID control) and auto-tune function
- 30 segments programmed with ramping, cooling, and dwelling steps
- Built-in over-temperature alarm and thermocouple failure alarm
- +/- 1 ºC temperature control accuracy
- Default DB9 / PC communication port
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| Vacuum Sealing |
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| Vacuum level |
10^-2 torr by a mechanical vacuum pump. 10^-5 torr by Turbomolecular pump. Leak rate < 5 mtorr / min. |
| Pressure Measurement / Monitoring |
- Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa.
- OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.
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Laptop, software (Optional)
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
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Labview-Based Temperature Control System (MTS01)enables the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
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| Compliance |
- CE Certified
- NRTL(UL61010) or CSA certification is available at extra cost.
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| Notes |
- Please click here to see our typical temperature profile calibration result at various temperatures.
- How to set up a ceramic tube and vacuum flange for MTI Tube furnace
- Proper placement of tube blocks
- The furnace can grow 3C-SiC film on Si; please read the below article to see the procedure
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Warning

Click here to learn more about the installation of a gas regulator.
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- The tube furnaces with alumina tubes are designed for use under vacuum and low pressure <3 psig
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Attention: A pressure regulator must be installed on your input gas tank
- Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damage.
- The flow rate for gasses should be limited to < 200 SCCM (or 200ml/min)
- Vacuum pressures may only be safely used up to 1300°C
- The furnace is not rated for flammable gas. To use flammable gas, please contact MTI and review our hydrogen furnaces.
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| Attention Notes |
- Performance degradation (i.e. furnace cannot reach the maximum temperature of 1500°C) is normal due to aging of SiC heating elements. It is time to replace all the heating elements. Please order the replacements from the standard package list below.
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