Description
MFC-A is a digital mass flow controller for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.
- This product did not have a display, it must be controlled by the computer using manufacturer software.
- Digital Mass Flow Controller for Gas Control Systems
- Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces.
- Used for accurately controlling and measuring the gas flow rate of high pressure.
- Ideal for CVD and other gas mixture applications.
- International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting.
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Full scale range (N2) |
( 0100,200,500,1000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com |
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Accuracy |
±1.0% S.P. (≥35% F.S.) |
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±0.35% F.S.(35% F.S.) |
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Repeatability |
±0.2% FS |
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Linearity |
±0.5% FS |
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Response Time |
≤1sec |
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Valve Rest Position |
Normally Closed or Normally Open |
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Temperature Coefficient |
Zero: ≤±0.05% F.S./ Span: ≤±0.1% F.S.≤30 SLM Span: ≤±0.2% F.S.30 SLM |
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Zero Drift |
0.6%F.S. per year without autozero |
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Surface Finish (Ra) |
25Ra |
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Operation Temperature |
545 |
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Communication Interface for input Signal |
Digital: RS485 DeviceNetTM Analog:(05)VDC or (420)mA |
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Communication Interface for Output Signal |
Digital: RS485 DeviceNetTM Analog:(05)VDC or (420)mA |
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Power Supply |
±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA) |
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Electronic Connector |
D-sub 9 pins male, D-sub 15 pins male, DeviceNetTM male |
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Differential Pressure |
(0.050.35) Mpa≤10000SCCM (0.10.35) Mpa20000SCCM,30000SCCM (0.20.45) Mpa50000SCCM |
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Max Pressure |
3MPa |
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Leak integrity |
1×10-9 atm·cc / sec He1×10-10 Pa·m3 / sec He |
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Seals Materials |
Viton; Neoprene |
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Surface Chemistry (EP only) |
—— |
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Fittings |
Swagelok1/4” |
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Weight |
1kg |