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N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement only) - MFC-7B
  • N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement only) - MFC-7B
N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement only) - MFC-7B

N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement only) - MFC-7B

SKU: mfc-7b

Price: RFQ

Specifications

 EQ-MFC-7B is a cost effective MFC for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes. MFC are standard calibrated by N2 while it is out of factory, other gas calibration can be approximated by converting of conversion factors of our instruction, Other gas calibration MFC can be ordered upon request, please email us for the price, the lead time is 8 -10weeks after PO. Mass Flow Controller for the use in MTI Multiple Channel Gas Control Systems only Ideal for vacuum coating and other gas mixture applications. International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting Note This MFC is for replacement of MTI gas mixing and delivery system at related product below. In order to operate it independently, you need order MFC-COM Specification Full scale range (N 2 ) ( 0100,200, 500, 1000, 2000, 5000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com Accuracy ±1.5% F.S. Repeatability ±0.2% FS Linearity ±1% FS Response Time ≤10sec Valve Configuration Normally Closed Operation Temperature 545 Input Signal (05) VDC Output Signal (05) VDC Power Supply +15V 50mA; -15V 200mA Electronic Connector D sub 15 pins male Differential Pressure (0.10.5) Mpa Max Pressure 3MPa Leak integrity 1×10 -8 atm·cc / sec He Seals Materials Viton ; Neoprene Fittings Swagelok1/4” Weight 1.1kg

Full scale range (N2)

( 0100,200, 500, 1000, 2000, 5000)SCCM

Other range can be customized at extra cost, please email to info@mtixtl.com

Accuracy

±1.5% F.S.

Repeatability

±0.2% FS

Linearity

±1% FS

Response Time

≤10sec

Valve Configuration

Normally Closed

Operation Temperature

545
Input Signal (05) VDC
Output Signal (05) VDC

Power Supply

+15V 50mA; -15V 200mA

Electronic Connector

 D sub 15 pins male

Differential Pressure

(0.10.5) Mpa

Max Pressure

3MPa

Leak integrity

1×10-8 atm·cc / sec He

Seals Materials

Viton; Neoprene

Fittings

Swagelok1/4”

Weight

1.1kg

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