1150°C Dual Zone Tube Furnace: 10" OD Quartz Tube (GE214) & Vacuum Flanges (24" heating zone) - GSL-1100X-II-10

1150°C Dual Zone Tube Furnace: 10" OD Quartz Tube (GE214) & Vacuum Flanges (24" heating zone) - GSL-1100X-II-10

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1150°C Dual Zone Tube Furnace: 10" OD Quartz Tube (GE214) & Vacuum Flanges (24" heating zone) - GSL-1100X-II-10

1150°C Dual Zone Tube Furnace: 10" OD Quartz Tube (GE214) & Vacuum Flanges (24" heating zone) - GSL-1100X-II-10

SKU: gsl-1100x-ii-10

Price: RFQ

Description

GSL-1100X-II-10 is a two-zone 10" O.D GE214 fused quartz tube furnace with a vacuum flange. It is widely used for material or chemical lab to sinter all types of new material samples and anneal semiconductor wafers (max. 8") under vacuum or other gas conditions. The temperature of the furnace is controlled by a high precision controller with an accuracy of +/- 0.1°C and 24 segments programmable up to 1150°C under a high vacuum.

SPECIFICATIONS 


Furnace structure
  • Double layer flange with water cooling
  • Total 24" heating zone length and 300 mm constant temperature zone.
  • GE214 quartz tube which can reach 1150ºC under vacuum
  • Two water cooling flange installed to keep the temperature low on the flange, water chiller needs to purchase separately. Please contact us for more information.
  • High purity alumina fibrous insulation structure for max energy saving
  • Hinged type flange for easy sample loading
Input voltage 208 - 240V AC Single phase
Power 8kW (50Amps Air Breaker is required)


Fused quartz tube size
  • One GE214 quartz tube is included: 254 O.D x 244 I.D x 1000mm Length (10" O.D x 9.6" I.D x 40" L)
  • The tube can hold an 8" wafer boat, pls click the picture below to order a quartz boat or flat sample order
          Click here to choose a crucible
Heating element NiCrAl Resistance Wire

Working Temperature
  • Max. heating temperature: 1150°C (< 60min) ( Under vacuum and flowing gas)
  • Continuous working temperature: 400 -1100°C 
  • Max. heating/cooling rate: 20°C/min
  • Optional: If upgrade to GE 214 tube, Max. working temperature can reach 1150°C



Heating zone
  • Two heating zones, each zone 300mm ( 12" ) long
  • Total heating zone length: 600mm (24'')
  • constant temperature zone: 300mm at the center (with +/-1°C) ( if set up two zones at the same temperature )
  • Two foam ceramic blocks with alumina coating are included, which must be placed inside the tube as shown in the picture below (Optional quartz block is available at extra cost, please click here to order)

Temperature controller
 
  • Two Eurotherm 3000 precision digital controllers with PID function and 24 segments programmable
  • An extra temperature monitor has the function of protection from over-temperature and broken T/C
  • K type T/C
  • Temperature accuracy: +/- 0.1°C
  • Built-in RS 485 port for PC remote operationand software is included


Vacuum &Fitting Ports
  • One pair of hinged type stainless steel vacuum seal flange with water cooling
  • One mechanical gauge is included
  • Two stainless steel needle valves & 1/4" hose fittings, KF25 vacuum port, and 1/4'' feedthrough. Vacuum pressure limit: depending on the vacuum pump. (Usually 10-2 torr by the mechanical pump, and 10-4 torr by the turbopump).
Water Chiller (Optional)
  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately here) to save water. 
Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request at an extra cost
Application Notes
 
Click here to learn the installation of a gas regulator.
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi 
  • Vacuum pressures may only be safely used up to 1000°C. 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.


Operation Instructions & Video

,

Part No.
Description
Link
KF-suite
KF-D25 series Vacuum Suite(vacuum pump, vacuum ball valve, vacuum bellows, quick clamps, KF adapter) Also you may buy individually.
MTS02 Computerized temperature Control System
Optional High vacuum station (Mechanical pump + turbo molecular pump.)
Optional Gas mix station (Float flow meter / Mass flow meter)(2, 3, 4 channels selectable)


Quartz Boats /crucible /container /sample holder

QTB-11

Quartz thermal block