Description
GSL-1100X-8.5-SR-III is a three heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing a various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100°C, which is controlled by a precision controller with accuracy +/-1°C and 30 segments programmable.
| Furnace structure |
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| Input voltage | 220VAC Single phase |
| power | 8kW |
| Fused quartz tube size |
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| Heating element | NiCrAl Resistance Wire |
| Working Temperature |
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| Heating zone |
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| Temperature controller |
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| Vacuum Flange and gas feedthrough ports |
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| Compliance |
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| Warning |
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Part No.
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Description
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Quick Link
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