Description
This is an 8'' Dia. pinned shower head for uniform gas delivery for DIY of ALD or CVS. It is a necessary tool for developing CVD film on wafers up to 4'' dia.
Specifications:
| Body Materials |
Top flange: Stainless steel ( SS304) Bottom Showerhea Plate: Aluminum 3003 O-Ring: Silicone |
Gas Feeding Tube |
9.5mm O.D x 6mm I.D |
Pin Hole Size |
1.0 mm Dia. |
Shower-head |
Special design to ensure uniform distribution and gas/vape |
Dimension |
|
| Warranty | 1-year limited warranty with lifetime support |
| Weight | 4 lbs |