Gas Mixing Systems

Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM

Three Channel Compact Anti-Corrosion Gas Mixer Made of PTFE (100 -1000 mL/min) - CGM-3F-PTFE

Anti-Corrosion Three Channel Gas Mixing Control Station Made of PTFE Parts - GSL-3F-PTFE

Compact Two Channel Trace Gas Mixer (16 -160 ml/m Flowmeter) - CGM-2F

Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS

2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software - GSL-LCD

2 Channel ALD Control Unit with 4 Channel MFC Gas Delivery System - GSLALD4

Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S

Compact Liquid Vaporization Systems with Temperature and Pressure Control for CVD & DLCVD - LVD-F1