Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max) - VTC-300USS

VTC-300USS is a cost-effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air-assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system for substrate heating.  It also can be considered as an atmosphere mist CVD system

SPECIFICATIONS:

Features	Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned/uneven substrate The system also works on spin alone and spray alone modes
Spin Coater	Vacuum chuck with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square One oil-less pump for the vacuum chuck is included and controlled by the spin coater Spin speed: 300 - 3000 rpm adjustable For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"
Spray Nozzle	One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included Two spray nozzles with the KF-25 adapter are included. (Click the first picture from the right to see details) One cylindrical type -- narrower spray ~20 mm diameter One cone type -- wider spray ~40 mm diameter Recommended compressed air pressure for the aqueous solution: ~2 psi One flow meter is integrated for regulating and monitoring the compressed airflow Fluid viscosity range: 1 - 100 mPa·s (cP) One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range Low-cost compressive gas atomizing nozzle is available upon request
Heatable Syringe Pump	A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle One 20 mL syringe is included for immediate use. The unit can accommodate a syringe with a 0.4 - 30 mm diameter Pumping rate: 0.001 - 20 mm/min adjustable A flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C
Heat Lamp and Control	Dual heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for the heating substrate by radiation (up to 65 ºC with 12" metal substrate)
Optional	MTI strongly suggests you place the spin-spray coater inside a fume hood for health and safety concerns.  Compressive gas atomizing spray nozzle is  available for NRTL certification (Pic. 2) A customized Multi spray head is available upon request ( pic 3 )                Pic 1                                       Pic. 2                               Pic. 3
Utility Requirement	Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MTI Attention: If a gas cylinder is used instead of an air compressor(pic2), a two-stage pressure regulator(pic1) must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. Click here to learn the installation of a gas regulator.
Net Weight	160 lbs
Shipping Weight & Dimensions	425 lbs, 48"x40"x42" 255 lbs, 48"x40"x40" 155 lbs, 48"x40"x35"
Compliance	CE Certified NRTL certification is only available with compressive gas atomizing spray nozzle
Warranty	One year limited with lifetime support Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Operation Manual & Video
Application Notes	The process must be confined in a fume hood (Order at the Optional section) with proper exhaust handling  Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the liquid residues in the bow/base.  In order to achieve optimal coating quality, please consider cleaning the substrate with a plasma cleaner (Click the pictures below for more details) prior to coating. It will significantly reduce the surface tension on the substrates       Reference Articles Strong Magnetoelectric Coupling in Ferrite/Ferroelectric Multiferroic Heterostructures Derived by Low-Temperature Spin-Spray Deposition Spin- and Spray-Deposited Single-Walled-Carbon-Nanotube Electrodes for Organic Solar Cells Rapid Assembly of Functional Nanocomposite Films Using Spin-Spray Layer-by-Layer Processing