Description
RMP-O2 is an automatic recirculating oxygen purification system with a touch screen temperature control panel, which can provide an environment with oxygen concentration lower than 1 ppm for MTI's tube furnace. The gas purification system can replace expensive (10-6 torr) turbopump vacuum systems to achieve better oxygen-free conditions for crystal growth, CVD furnaces, and Ti alloy annealing furnace, etc.
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Working Voltage |
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Purification System
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| Purification Pipeline |
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Working gases |
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Communication with MTI furnaces |
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| Application Note |
(1) (2) (3) (4) (5)
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