Description
Substrate Specifications:
- Wafer Size: 5 x 5 x 0.5 mm thickness +/-0.05 mm
- Wafer Orientation: (110) +/-0.5 Deg
- Polishing: One side CMP polished with free sub-surface damaged
- Surface finish (RMS or Ra) : < 15A
- Package: Under 1000 class clean room, and in 100 grade plastic bag in a wafer container.
| LaAlO3 | SrTiO3 | ||||







