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Hybrid PVD Coater in Glove-box: One 2" RF Sputtering + Two Evaporation Sources - VTC-H3-GB
  • Hybrid PVD Coater in Glove-box: One 2" RF Sputtering + Two Evaporation Sources - VTC-H3-GB
  • Hybrid PVD Coater in Glove-box: One 2" RF Sputtering + Two Evaporation Sources - VTC-H3-GB
Hybrid PVD Coater in Glove-box: One 2" RF Sputtering + Two Evaporation Sources - VTC-H3-GB

Hybrid PVD Coater in Glove-box: One 2" RF Sputtering + Two Evaporation Sources - VTC-H3-GB

SKU: hybrid-pvd-coater-in-glove-box-one-2-rf-sputtering-two-evaporation-sources-vtc-h3-gb

Price: RFQ

Specifications

 VTC-H3-GB is a special PVD coating system in the glovebox, which consists of one RF plasma sputtering head and two evaporation crucibles for research of solid-state battery.  The RF plasma gun is for coating solid electrolyte on the cathode electrode and one evaporation source is for coating Lithium on the solid electrolyte, and another evaporation source is coating copper film on the lithium to form a sealed solid-state battery. SPECIFICATIONS Input Power AC 208-240 V Single Phase, 50/60 Hz 1.5 KW (for glove box); 2.5 KW ( for PVD coaters) Total:  4.0 KW Glove-Box Chamber dimension: 1200 mm L x 740 mm W x 900 mm H The gas purification station is included to ensure  O2 & H2O less than 1ppm) in the glove box. Case Material: Stainless steel 304 with 3 mm thickness Chamber dimension: 1200 mm L x 740 mm W x 900 mm H Openable front window panel (tempered glass, 8 mm thick)  for easy device loading Please Click Picture left for detail specification Vacuum Chamber and sample holder The vacuum chamber is made of  SS304 and recessed in the bottom of the glovebox The top flange is the hinged type and operable manually Two quartz windows are installed in the chamber fro observation. Plasma sputtering head and two evaporation heater are installed on the bottom of the chamber. One rotary sample holder is built-in the top of the flange which can hold max. 4" sample Rotating speed: 5 rpm One rotary shutter is built-in the bottom of the flange, which will cover two coating source during one source working to avoid the cross-contamination. RF Plasma Generator & Sputtering Head ( click the picture to see detailed specs) One 13.5 MHz, 300 W RF Generator with automatic matching function is installed in the outside glovebox and connected to 2" sputtering head (click picture 1 to see detailed specs). One 2" Magnetron Sputtering Heads with water cooling jackets are inserted into the vacuum chamber from the bottom of the glovebox. (click picture 2  to see detailed specs). One 16 L/min digitally controlled recirculation water chiller is included for cooling magnetron sputtering heads (click the picture 3 to see detailed specs). The RF sputtering head can despite either insulation material  or conductive material Pic.1 Pic. 2 Pic.3 Thermal Evaporation Two tungsten coil heaters with two B type of thermocouples and Alumina crucibles are built at the bottom of the vacuum chamber ( See Pic. 1) One digital temperature controller with 30 programmable segments and +/- 1 ºC accuracy  to control the heater (PIC. 2) One power switch is installed to change heating from one crucible to another by the same temperature controller Working temperature:        200 ºC - 1700 ºC Recommend Heating rate:  0.3 ºC/s (RT-1200 ºC) and 15 ºC/s  (1200 ºC - 1700 ºC) Four alumina crucibles (up to 1700 ºC) and two tungsten coil heaters are included. Please refer to the Optional section for ordering spare parts. Pic. 1 Pic. 2 Vacuum Pump The KF25 vacuum port is installed to connect to a vacuum pump The highest vacuum may reach <4.0E-6 Torr by pumping overnight with optional Turbopump Anti-Corrosive Capacitance Diaphragm Gauge is included for vacuum up to 1.0E-6 TorPic.1 A vacuum pump is optional. Please click Pic. 2 or 3 to order Double-Stage Rotary Vane Vacuum Pump ( 10-2 torr) or turbopump  ( 10-5 torr) Pic. 1 Pic. 2 Pic. 3 In-Situ Film Thickness Monitor (Optional) In-situ high precision thickness monitor for the thin film deposition process is recommended.  It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystal’s oscillating frequency. Thickness accuracy:   0.1 Å Please click the picture left to see detailed specifications. Net Weight ~800lbs Warranty One-year limited warranty (Consumable parts such as heating elements, processing tubes and o-rings are not covered by the warranty) Compliance CE Certified NRTL certification (UL61010)  or CSA certification is available upon request at extra cost. Operation Instructions

Input Power

  • AC 208-240V Single Phase, 50/60 Hz
  • 1.5 KW (for glove box); 2.5 KW ( for PVD coaters)
  • Total:  4.0 KW
   Glove-Box
  • Chamber dimension: 1200 mm L x 740 mm W x 900 mm H
  • The gas purification station is included to ensure  O2 & H2O less than 1ppm) in the glove box.
  • Case Material: Stainless steel 304 with 3 mm thickness
  • Chamber dimension: 1200 mm L x 740 mm W x 900 mm H
  • Openable front window panel (tempered glass, 8 mm thick)  for easy device loading
  • Please Click Picture left for detail specification
 Vacuum Chamber and sample holder
  • The vacuum chamber is made of  SS304 and recessed in the bottom of the glovebox
  • The top flange is the hinged type and operable manually
  • Two quartz windows are installed in the chamber fro observation.
  • Plasma sputtering head and two evaporation heater are installed on the bottom of the chamber.
  • One rotary sample holder is built-in the top of the flange which can hold max. 4" sample
  • Rotating speed: 5 rpm
  • One rotary shutter is built-in the bottom of the flange, which will cover two coating source during one source working to avoid the cross-contamination.
  RF Plasma Generator 
  &  Sputtering Head
 

 ( click the picture to see detailed specs)
  • One 13.5 MHz, 300 W RF Generator with automatic matching function is installed in the outside glovebox and connected to 2" sputtering head (click picture 1 to see detailed specs).
  • One 2" Magnetron Sputtering Heads with water cooling jackets are inserted into the vacuum chamber from the bottom of the glovebox. (click picture 2  to see detailed specs).
  • One 16 L/min digitally controlled recirculation water chiller is included for cooling magnetron sputtering heads  (click the picture 3 to see detailed specs).
  •  The RF sputtering head can despite either insulation material  or conductive material 
  • Pic.1 Pic. 2    Pic.3
Thermal Evaporation 

 
  • Two tungsten coil heaters with two B type of thermocouples and Alumina crucibles are built at the bottom of the vacuum chamber ( See Pic. 1)
  • One digital temperature controller with 30 programmable segments and +/- 1 ºC accuracy  to control the heater (PIC. 2)
  • One power switch is installed to change heating from one crucible to another by the same temperature controller 
  • Working temperature:        200ºC - 1700ºC
  • Recommend Heating rate:  0.3 ºC/s (RT-1200 ºC) and 15 ºC/s  (1200ºC - 1700 ºC)
  • Four alumina crucibles (up to 1700 ºC) and two tungsten coil heaters are included. Please refer to the Optional section for ordering spare parts.
  •  Pic. 1    Pic. 2

Vacuum Pump
  • The KF25 vacuum port is installed to connect to a vacuum pump
  • The highest vacuum may reach <4.0E-6 Torr by pumping overnight with optional Turbopump
  • Anti-Corrosive Capacitance Diaphragm Gauge is included for vacuum up to 1.0E-6 TorPic.1
  • A vacuum pump is optional. Please click Pic. 2 or 3 to order  Double-Stage Rotary Vane Vacuum Pump  ( 10-2 torr) or turbopump  ( 10-5 torr)
  • Pic. 1 Pic. 2   Pic. 3  

In-Situ Film Thickness Monitor
      (Optional)
  •  In-situ high precision thickness monitor for the thin film deposition process is recommended.  It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystal’s oscillating frequency.
  • Thickness accuracy:   0.1 Å         
  • Please click the picture left to see detailed specifications.

Net Weight

~800lbs 

Warranty 

 One-year limited warranty (Consumable parts such as heating elements, processing tubes
and o-rings are not covered by the warranty)

Compliance
    
  • CE Certified
  • NRTL certification (UL61010)  or CSA certification is available upon request at extra cost.

Operation Instructions

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