GSL-1800X-ZF4 is a high-vacuum evaporation coater designed for coating oxygen-sensitive metallic materials, such as Ti, Al, Au, etc. It also can be used for coating other materials. It has four evaporation heating sources for layer by layer deposition inside a high vacuum chamber, up to 10-6 torr.
Note: Since May 2023, increase chamber size to easily load sample
SPECIFICATIONS
|
Input & Output Power
|
- Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase
- Total Power required: 5 KW ( including pump)
- Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )
|
|
Vacuum Chamber
|
- Stainless steel chamber: 300mm ID. x 360 mm H, polished finish.
- 100 mm observation window
- Hinged-type door for easy sample loading
- Motorized shutters for each evaporation boat,
- One ISO-100K port for connection with a turbo pump and a gate valve.
- One KF16 port to connect the vacuum gauge
- Six CF35 ports to connect a necessary device (e.g. film thickness monitor (QCM))
|
Vacuum Pump ( optional)
 
|
- 260 L/s turbo molecular pump
- Vacuum level: 5.0x10-6 Torr ( after 40 minutes of pumping )
- Limit vacuum: 5.0x10-7 Torr ( after baking at 100 -150°C)
- Leaking rate: 5.0x10-7 Pa.
- Vacuum Port: DN 100 ISO-K
- A mechanical pump (YTP-550-LD) is required as a backing pump to initially achieve the vacuum level of <1e-2 torr
|
Evaporation Source
&
Sample Holder
|
- Four tungsten heating boats with water-cooled shrouds
- Tungsten heating boat, 70L x 12W x 3H (mm).
- Ø120 mm rotary sample holder
- Evaporation distance from source to sample holder is 140-200 mm
- The sample stage with a heating function (up to 500 °C) is optional upon request
  
|
In-situ thickness monitor optional
|
- Quartz crystal microbalance is optional for thickness measurements
- The accuracy of thickness control is 1.0 Angstrom.
|
|
Control Unit
|
- Vacuum, thickness, and power control are integrated into one control box
- The Control Unit is separated from the vacuum chamber for easy moving
|
|
Facility Requirement
|
- Space: 250 SF with height > 6 feet
- Chilled Water: > 16L/minute flowing water required for electrode cooling or using a recirculating water chiller
|
|
Certificate
|
|
