1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE

RM0.00 MYR

1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE

Name: 1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE
Brand: MTI
SKU: GSL-1200R-MWPE
Availability: OutOfStock

SKU: gsl-1200r-mwpe

Price: RFQ

Description

GSL-1200R-MWPE is an MPCVD (microwave-assisted CVD) rotary furnace. It integrates the 2.45GHz microwave generator and 2" rotary processing tube ( 0-5 rpm) with vacuum-sealed flanged to provide stable plasma from 800oC to 1200oC under ~4.5 torr vacuum. It is designed to fast calcine powder and form the core-shell structure for powder in battery research.

SPECIFICATIONS:

Power	Total 2000W 208-240VAC, Single phase, 50/60Hz
Microwave	Frequency: 2.45 GHz ±25 MHz Power Output: 1400W Microwave leaking: ≤ 3 mW/cm² at 1 meter away. One digital power controller is built in to adjust output power from 10 - 100%
Heating Module and Processing Tube	Ni-Cr-Al wire heating coin with 80 mm ID is installed inside a fibrous alumina module (Pic. 1) The heating coil is placed inside the microwave chamber 2" Fused quartz processing tube with a mixing blade in the center (Pic. 2 and Pic.3) Pic1. Pic.2 Pic.3
Flanges & Vacuum	One pair of vacuum flange is included to seal the quartz tube KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1) One digital vacuum gauge is included for vacuum control ( Pic. 2) Max. Vacuum level: 10-2 torr by dry pump and 10-5 torr by turbopump. The pump is not included. Please click Pic. 3 to order separately. For CVD application, suggest choosing a dry pump. Pic. 1 Pic. 2 Pic.3
Inline Swivel & Rotary Speed	Two Inline Swivel Gas Fittings are included and connected to flanges, which allows gas pipe in place when the tube rotating Rotation speed: Tube rotation is driven by a DC motor with a speed range of 1- 5 rpm variable A 1/4" gas tube is required to connect the Inline Swivel Gas Fittings to the gas tank Click the picture left to see detailed specs
Working Temperature	Max. 1200ºC < 30 minutes with heating module assisted Min. 800ºC with heating module assisted ≤1100ºC continuous with heating module assisted and Plasma Heating rate: 1 ~20°C / min programmable ~750ºC heating by microwave only without temperature control
Temperature Controller	30 segments programmable for heating rate, dwell temperature and time, and cooling rate SCR temperature control Over-temperature and thermal couple broken protection Control accuracy +/-1.0 ºC K-type thermal couple inserted through the flange
Compliance	CE Certified NRTL or CSA certification is available upon request