Description
|
Dopant |
Type |
Carrier Concentration |
Mobility |
Resistivity |
EPD |
|
Undoped |
P |
1.0~2.0 x 1017 |
600 ~ 800 |
~0.1 |
<10000 |
|
Zn |
P+ |
1.0~3.0 x 1017 |
200 ~ 500 |
~0.004 |
<10000 |
|
Te |
N |
2.0~6.0 x 1017 |
2500 ~ 3500 |
~0.05 |
<10000 |
|
High Resistivity |
P or N |
1.0~2.0 x 1016 |
460 |
~ 1.0 |
<100 |
| Other GaSb |
InAs |
InP |
GaAs |
InSb |
Wafer Box |
Film Coater |
RTP Furnaces |