Description
Specifications
- Film: UNCD (Ultra nanocrystalline Diamond)
- Wafer Size: 5x5x0.5mm
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Si wafer Orientation: (100) + / - 0.5o
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Insulating Layer: SiO2
- Diamond film thickness: 2 microns, undoped
- Oxide Layer: 1 micron
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Estimated Resistivity: ~ 10E5 ohm-cm
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Surface Roughness: as grown , RA < 10 nm
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Package: One 1000 class clean room with 100 class plastic bag


