Description
Substrate Specifications
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Crystal Grade: Single Crystal with substrate grade
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Size: 10 x 10 x0.5 mm+/- 0.05 mm
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Polished: One sides epi polished by CMP
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Orientation: <110> +/- 0.5 o
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Packing: 1000 class clean room in vacuum bag
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Shipping: in a thermal box with battery pack to keep substrate > 13oC