Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S

• Two Precision Mass Flow Controller (MFC) inside
• Working Temp. : 5~45 ºC
• Max. Pressure: 3x10⁶ Pa
• Accuracy: ±1.5% FS
• Liner: ±0.5-1.5%F.S.
• Duplicate accuracy: ±0.2%F.S.
• Controlling Range:
• Controller 1: 1~ 99 SCCM
• Controller 2: 1~199 SCCM

Power

• Voltage: AC 208 - 240V Single phase 50/60Hz
• Power: 100 W in total
• May order a 100W transformer to operate at 110VAC (Click Pic below to order)

PLC Touch Screen

• 6" color touchscreen control panel to make parameter setting easy.
• Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. 

• One stainless steel gas mixing tank is built-in
• Internal pipeline: 1/4" O.D stainless steel
• External pipeline: 1/4" O.D PTFE
• Gas Mixing Tank: Φ80X120mm
• Stop Valve & Fittings
• 316 stainless steel needle valve, 
• Φ1/4” Swagelok Tube Fitting

• All components are CE certified
• NRTL (UL61010) or CSA certification is available at extra cost. 

• An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture left to learn more:

CVD & PECVD

Furnace Click pictures below to order bubbler or evaporator for CVD