{"product_id":"three-zones-tube-furnace-4-with-vacuum-pump-1-0e-4-torr-9-channel-digital-gas-flow-meters-for-cvd-otf-1200x-4-iii-9hv","title":"Three Zones Tube Furnace (4\") with Vacuum Pump (1.0E-4 torr) + 9 Channel Digital Gas Flow-meters for CVD - OTF-1200X-4-III-9HV","description":"\u003cp\u003eOTF-1200X-4-III-9HV is CE certified 4\" diameter split three-zone tube furnace with vacuum pump system (up to 10-4 torr) and 9 channel PLC Touch Panel precision digital Mass flow meters Gas Control System, which can control nine types of gases for CVD or diffusion \u003cspan style=\"color: rgb(255, 42, 0);\"\u003e(Updated with PLC Touch Panel Gas control system since August 3, 2015 )\u003c\/span\u003e .\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable cellspacing=\"0\" style=\"border: 1px solid #0099cc; font-family: Arial; border-collapse: collapse; width: 987px; height: 1728px;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd rowspan=\"11\" style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eFurnace\u003cbr\u003e\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-III-HVC_series_sturcture.jpg?v=1706131653\"\u003e\u003cimg height=\"120\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-III-HVC_series_sturcture.jpg?v=1706131653\" width=\"180\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eStructure\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eDouble-layer steel casing with air cooling.\u003cbr\u003eHigh purity alumina fiberboard liner for energy cost-effective operation.\u003cbr\u003eThree heating zones with three independent temperature controllers.\u003cbr\u003eVacuum and gas mixing system are located in the bottom Mobile cart with 4 wheels. \u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eHeating Element\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eFe-Cr-Al Alloy doped by Mo\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eMax. Heating Temp.\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e1200°C\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eContinuous Heating Temp.\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e1100°C\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eMax. Heating Rate\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u0026lt;=20°C\/min\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eHeating Zone Length\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eThree zones:   (880mm,  35\" in total)\u003cbr\u003eZone 1: 220 mm + Zone 2:  440 mm + Zone 3: 220 mm \u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eConstant Temp. Zone\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e20\" (500 mm) length (three zones at equal temperature within +\/- 1°C) \u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eTube Size and Materials\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eFused Quartz Tube\u003cbr\u003e100 mm O.D x 92 mm ID. x 1400 mm\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eTemp. Controller\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eThree programmable precision digital temperature controllers with 30 segments, which control each heating zone separately.\u003cbr\u003ePID adjustable with auto tune function to ensure temperature stability within  +\/ - 1 oC.\u003cbr\u003eFull protection in each controller for over-temperature and broken thermal couple.\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eThermocouple\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eThree K-type thermocouples\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003ePower Input\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eAC 208~240V, Single Phase, 50\/60Hz, 7KW max.\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eVacuum Fittings\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd colspan=\"2\" style=\"border: 1px solid #0099cc;\"\u003e\n\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u003cbr\u003eThe Standard vacuum accessories include:\u003cbr\u003e\u003c\/span\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eTwo stainless steel vacuum flanges with KF-25 pump connector, two needle valve and one 1\/4\" Swagelok tube connector.\u003cbr\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e Six pieces of  high-temperature silicone O-ring for using under 300°C.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e Two pairs of alumina thermo-blocks are included for protecting flange from heat radiation. \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eOne KF-40 vacuum bellows\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eThree KF-40 quick clamps.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eTwo KF-25 quick clamps.\u003cbr\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e \u003cbr\u003e\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd rowspan=\"8\" style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eHV Station\u003cbr\u003eHigh Vacuum Station\u003cbr\u003e\u003cbr\u003e\u003cimg height=\"80\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-PAC-LD.jpg\" width=\"120\"\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eStructure\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eMobile cart size:  600 (L) x 600 (W) x 700(H), mm\u003cbr\u003eMax. Loading:       600 Lbs on top\u003cbr\u003eMolecular pump control Panel:   LCD digital\u003cbr\u003eInside:   Pfeiffer vacuum pump  Made in Germany\u003cbr\u003e\u003cspan style=\"color: #800080; font-size: 10pt; font-weight: bold;\"\u003eVacuum sensor is included\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u003cspan style=\"font-size: 10pt;\"\u003eVacuum sensor\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eThe vacuum sensor has a KF-25 connector.\u003cbr\u003eHigh vacuum gauge (measuring range 10^-8 mbar ~ 10^3 mbar)\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eControl Panel\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\n\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003cspan style=\"font-weight: bold; font-size: 10pt;\"\u003eOne button operation\u003c\/span\u003e - the diaphragm pump and the turbomolecular pump will start after pressing the \"start\" button.\u003c\/span\u003e\u003cbr\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003cspan style=\"font-weight: bold; font-size: 10pt;\"\u003eSystem controlled spinning speed\u003c\/span\u003e - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.\u003c\/span\u003e\u003cbr\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003cspan style=\"font-weight: bold; font-size: 10pt;\"\u003eSelf-protection\u003c\/span\u003e - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum. \u003c\/span\u003e\u003cbr\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003cspan style=\"font-weight: bold; font-size: 10pt;\"\u003eLCD screen\u003c\/span\u003e - double lines parameters checking int\u003cspan style=\"font-size: 10pt;\"\u003eerface\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"font-size: 10pt;\"\u003e make the working easier to be handled.\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\n\u003ctable align=\"\" style=\"width: 514px; height: 99px;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS-02_panel_2.jpg?v=1706115329\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0\" height=\"59\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS-02_panel_2.jpg?v=1706115329\" width=\"59\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS-02_panel_1.jpg?v=1706115329\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0\" height=\"58\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS-02_panel_1.jpg?v=1706115329\" width=\"58\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_2.jpg?v=1706115328\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0px\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_2.jpg?v=1706115328\" style=\"width: 56px; height: 55px;\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_3.jpg\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0px\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_3.jpg\" style=\"width: 53px; height: 53px;\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_4.jpg\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0px\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_4.jpg\" style=\"width: 53px; height: 51px;\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eSelf-testing\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eSpinning up\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eError report\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eVoltmeter\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e Full speed\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eVolume Flow Rate\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eNitrogen   N2     33 L\/s\u003cbr\u003eHelium     He     39 L\/s   (2340L\/minute)\u003cbr\u003eHydrogen   H2     32 L\/s\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u003cspan style=\"font-size: 10pt;\"\u003eWorking Range\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eFrom 1000 mbar to \u0026lt;1E-7 mbar\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003c\/span\u003e\u003cspan style=\"font-size: 10pt;\"\u003eUltimate Pressure\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e10^-5 torr (with tube furnace)\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003ePower Input\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e110V AC or 220V AC switchable, 50\/60Hz\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003ePower consumption\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eDuration\/Max power: 100\/110Watt\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eMFC Station\u003cbr\u003eMass Flow Controller\u003cbr\u003e\u003cbr\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/FourChannelGasMixingStationwithPLCTouchPanelandMFC-EQ-GSL-4Z-LCD.aspx\"\u003e\u003cimg height=\"80\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/plcmfc.jpg\" width=\"120\"\u003e\u003cbr\u003e\u003cstrong\u003e\u003cstrong\u003e\u003cstrong\u003e \u003c\/strong\u003e\u003c\/strong\u003e\u003c\/strong\u003e\u003c\/a\u003e     \u003cbr\u003e\u003cstrong\u003e\u003cstrong\u003e\u003cstrong\u003e     \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Flow4.png\"\u003e\u003cimg height=\"47\" id=\"ctl00_masterContent_productImageGallery_thumbPreview\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Flow4.png?ts=129931236595714663\" width=\"63\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/strong\u003e\u003c\/strong\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd colspan=\"2\" style=\"border: 1px solid #0099cc;\"\u003e\n\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e9 precision mass flow meters controllers are installed in the bottom mobile cart with the digital display panel of +\/-1.5% of Full Scale.\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cspan\u003eController 1: 0~100 \u003c\/span\u003e\u003cspan\u003eSCCM\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eController 2: 1~199 SCCM\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eController 3: 1~199 SCCM\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eController 4: 1~499 SCCM\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eController 5-9: measuring range can be customized upon request\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u003cspan style=\"color: #800000; font-style: italic;\"\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/EQ-GSL-LCD-video.aspx\"\u003e\u003cspan size=\"2\"\u003e\u003cspan\u003e\u003cimg height=\"94\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-GSL-LCD.jpg\" width=\"141\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/a\u003eThe flow rate control range is available for customization. Please contact us for detail information. \u003c\/span\u003e\u003cbr\u003e\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: small;\"\u003eOptional Parts\u003cspan style=\"font-family: arial, helvetica, sans-serif;\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd colspan=\"2\" style=\"border: 1px solid #0099cc;\"\u003e\n\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif;\"\u003e\u003c\/span\u003e\u003c\/span\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small;\"\u003eClick the picture below - left to order bubbler or evaporator for CVD\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif;\"\u003e\u003cstrong\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Flow4.png\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/span\u003e\n\u003cdiv\u003e\n\u003cdiv\u003e\u003cspan style=\"font-size: small;\"\u003e              \u003cstrong\u003e\u003cstrong\u003e    \u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/bl200STRUCTURE.jpg\" title=\"\" width=\"200px\"\u003e  \u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4.jpg\" title=\"\" width=\"200px\"\u003e\u003c\/strong\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eGas Pipe Connect\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd colspan=\"2\" style=\"border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eOne 1\/4“ Swagelok tube connect is installed in the left flange as the gas inlet.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eEach MFC Station has four 1\/4\" Swagelok tube connects. And four on\/off valves for each gas route. The fifth one is used as the gas outlet.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eThe 1\/4\" PTFE gas pipe is included in the standard package.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003cspan style=\"font-size: 10pt;\"\u003e[Optional] If a Stainless steel 1\/4\" gas tube is needed.\u003c\/span\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e \u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd rowspan=\"2\" style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eShipping Info\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eDimension\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eFurnace:     550 x 380 x 520mm\u003cbr\u003eMFC Station: 600 x 600 x 700mm\u003cbr\u003eHV Station:  600 x 600 x 700mm\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eWeight\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eNet weight: 100Kg\u003cbr\u003eShipping weight: 350 lb (two pallets)\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eWarranty\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd colspan=\"2\" style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eOne year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) \u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e\u003cspan\u003eCompliance\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd colspan=\"2\" style=\"border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan\u003e\u003cstrong\u003eCE\/UL\/CSA Certificate\u003c\/strong\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003ePlease select the certificate in options bar:\u003c\/span\u003e\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan\u003eCE Certificate \u0026amp; UL\/CSA ready to pass UL\/CSA certificate at extra cost\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003eUL certificate\u003c\/span\u003e\u003c\/span\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e -  UL approvals (UL 61010)\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003cspan face=\"Arial\"\u003e\u003cb\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cb\u003e              \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/TUVSN.png\" rel=\"prettyPhoto[products]\" title=\"\"\u003e\u003cimg height=\"40\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/TUVSN.png\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e    \u003ca href=\"https:\/\/www.osha.gov\/dts\/otpca\/nrtl\/nrtllist.html\"\u003e\u003cimg height=\"40\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/UL-CSA-MET-TUV.jpg\"\u003e\u003c\/a\u003e\u003c\/b\u003e\u003c\/span\u003e\u003c\/b\u003e\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; color: #ff0000; font-family: arial,helvetica,sans-serif;\"\u003eWarning\u003cbr\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/twostagebrass0-100psianalyticalcylinderregulatorcga-580withneedlevalve-fa-y12244d580.aspx\"\u003e\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"42\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQGRCGA580.jpg\" title=\"\" width=\"63\"\u003e\u003cbr\u003e\u003c\/a\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/cga580?variant=44985116164235\u0026amp;_pos=1\u0026amp;_sid=6efd4e30e\u0026amp;_ss=r\" target=\"_blank\"\u003eClick here to learn the installation of a gas regulator\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd colspan=\"2\" style=\"border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"color: #ff0000; font-family: arial, helvetica, sans-serif; font-size: 10pt; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eThe tube furnaces with quartz tube are designed for use under vacuum and low pressure \u0026lt; 0.12 MPa (absolute pressure)\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cem\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cspan style=\"color: #ff0000; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cstrong\u003eA\u003cem\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cspan\u003e\u003cstrong\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cem\u003e\u003cstrong\u003ettention\u003c\/strong\u003e: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.\u003c\/em\u003e \u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/cga580?variant=44985116164235\u0026amp;_pos=1\u0026amp;_sid=6efd4e30e\u0026amp;_ss=r\" target=\"_blank\"\u003eClick here to learn the installation of a gas regulator.\u003c\/a\u003e\u003c\/span\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/em\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/em\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; color: #ff0000;\"\u003eThe flow rate for gasses should be limited to \u0026lt; 200 SCCM (or 200 ml\/min) for reducing thermal shocks to the tube\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; color: #ff0000;\"\u003eVacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C \u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e,\u003c\/p\u003e\n\u003ctable align=\"\" style=\"width: 514px; height: 99px;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS-02_panel_2.jpg?v=1706115329\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0\" height=\"59\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS-02_panel_2.jpg?v=1706115329\" width=\"59\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS-02_panel_1.jpg?v=1706115329\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0\" height=\"58\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS-02_panel_1.jpg?v=1706115329\" width=\"58\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_2.jpg?v=1706115328\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0px\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_2.jpg?v=1706115328\" style=\"width: 56px; height: 55px;\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_3.jpg\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0px\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_3.jpg\" style=\"width: 53px; height: 53px;\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-family: arial,helvetica,sans-serif;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_4.jpg\"\u003e \u003cimg align=\"\" alt=\"\" border=\"0px\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/HVS2-interface_4.jpg\" style=\"width: 53px; height: 51px;\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eSelf-testing\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eSpinning up\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eError report\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003eVoltmeter\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"vertical-align: top; text-align: center; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"font-size: 10pt; font-family: arial,helvetica,sans-serif;\"\u003e Full speed\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984806277259,"sku":"OTF1200XIIIC9HV","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/OTF-1200X-4-III-9HV.jpg?v=1764850832","url":"https:\/\/mtimalaysia.com\/products\/three-zones-tube-furnace-4-with-vacuum-pump-1-0e-4-torr-9-channel-digital-gas-flow-meters-for-cvd-otf-1200x-4-iii-9hv","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}