{"product_id":"small-batch-12-pcs-6-wafer-pecvd-system-ccp-type-for-pilot-test-pecvd-8-16","title":"Small Batch (12 pcs 6\" Wafer) PECVD System ( CCP type ) for Pilot Test - PECVD-8-16","description":"\u003cdiv\u003e\u003cspan\u003ePECVD-8-16 is a CCP type PECVD system for a small batch of 12 pcs 6\" wafer.  The system consists of an 8\"ID quartz tube furnace up to 1100°C, a batch type graphite boat for 12 wafers, 1000W plasma generator, and a 4-channel programmable gas delivery system. It is an excellent tool for a pilot test of thin-film research of solar cell and 2D materials.\u003c\/span\u003e\u003c\/div\u003e\n\u003cdiv\u003e\u003cspan\u003e\u003c\/span\u003e\u003c\/div\u003e\n\u003ctable style=\"border-collapse: collapse; border: 1px solid black; width: 919px; height: 1084px;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eFurnace structure\u003cbr\u003e\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/BPECVD.png\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/BPECVD.png\" width=\"300\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eHigh purity alumina fibrous insulation for max energy saving\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003eThree heating zones to achieve 600 mm constant temperature zone up to 1100\u003c\/span\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003eº\u003c\/span\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003eC.\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e8.5\" OD 5 8\" ID quartz tube with vacuum-sealed flanges \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOne sliding rail driven by a DC motor facilitates loading of the graphite boat and samples\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eHigh purity graphite boat can carry up to 12 circular or rectangular 6\" wafers\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e1000W RF (13.5MHz) power supply is included for plasma generation.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eFour-channel gas mixing and delivery system is included for deposition of precursors\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e A vacuum pump (oil or dry type) is available upon request.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003ePower\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e208-240 VAC, single phase,  50\/60 Hz\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e9 kW\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003ePower cord is included without a plug. MTI may help customer add a power plug at an extra cost. \u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eQuartz tube \u0026amp; flanges\u003cbr\u003e\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"44\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/thumb_quartz_tube-400w.jpg?v=1706297129\" title=\"\" width=\"63\"\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e8.5\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\" O.D x 8.2\" I.D\u003c\/span\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e x 51\" Length\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003eOne quartz tube is included, and the spare tube is available as an option ( click picture left to order )\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003eSS304 flanges are included with the KF40 vacuum port \u0026amp; valve and  gas inlet \u0026amp; outlet are included\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003eBuilt-in dual sliding rails and DC motor drives the flange and sample boat in and out\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eGraphite Boat\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Graphiteboat.png\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg height=\"64\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Graphiteboat.png\" width=\"101\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eGraphite boat made of high purity graphite ( Japan) with RF electrodes\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e12 slots 4x3 ) slot to carry 6\" x6\" x0.5 mm  or 6\" diameter wafers\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eCustomized graphite boat ( 4x4 or 5 x4 ) is available upon request at the extra cost\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/graphiteboat2.png\" target=\"_blank\" rel=\"noopener\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/graphiteboat2.png\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eFurnace\u003cbr\u003e\u003ca href=\"https:\/\/mtimalaysia.com\/products\/gsl-1100x-xx-iii?_pos=1\u0026amp;_psq=GSL-1100X-XX-III\u0026amp;_ss=e\u0026amp;_v=1.0\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"58\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/gsl1100x11main2.jpg\" title=\"\" width=\"87\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eHeating element: NiCrAl Resistance Wire\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eHeating Zone:  Three heating zone (\u003cspan\u003e300 mm + 300 mm + 300mm )\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan\u003eConstant temperature zone:            600 mm within +\/- 2ºC (If 3 zone at the same temp.)\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan\u003eWorking temperature:                      \u003cspan\u003e\u003cspan\u003e400 -1100\u003c\/span\u003e\u003c\/span\u003e\u003cspan\u003e\u003cspan\u003e°C\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan\u003eMax. \u003cspan\u003eheating\/cooling rate:               10°C\/min\u003c\/span\u003e     \u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan\u003eClick the picture left to see details of furnace specs.\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\n\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eTemperature controllers\u003c\/span\u003e\u003cbr\u003e\u003ca href=\"https:\/\/mtimalaysia.com\/products\/fa-euro3000-d1?_pos=1\u0026amp;_psq=FA-EURO3000-D1\u0026amp;_ss=e\u0026amp;_v=1.0\" target=\"_blank\" rel=\"noopener\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"54\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/FAEURO3000D1_main1.jpg\" title=\"\" width=\"81\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003c\/span\u003e\u003c\/span\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eThree Eurotherm 3000 temperature controllers with 24 segments programmable\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eThree K type thermal couples are installed.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eTemperature accuracy: +\/- 0.1°C\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003ca href=\"https:\/\/mtimalaysia.com\/products\/mts02?_pos=1\u0026amp;_psq=mts02\u0026amp;_ss=e\u0026amp;_v=1.0\" target=\"_blank\" rel=\"noopener\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eSoftware and PC interface module\u003c\/span\u003e\u003c\/a\u003e is  included\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan\u003eRF Plasma Generator\u003c\/span\u003e\u003cbr\u003e\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"63\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_6670.1.jpg\" title=\"\" width=\"93\"\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eOutput Power:            20  -1000W adjustable with ± 1% stability\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eRF frequency:            13.56 MHz ±0.005% stability\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eMatching:                   Automatic with variable air capacitor\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eCooling:                     Air cooling\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eNoise:                        \u0026lt;50 dB\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003ePower:                       110 - 240VAC, 50\/60Hz\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan\u003eGas Delivery System\u003c\/span\u003e\u003cbr\u003e\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"57\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/plcmfc.jpg\" title=\"\" width=\"86\"\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eFour MFCs are built in a movable cart with a\u003cspan\u003eccuracy: \u003c\/span\u003e\u003cspan\u003e±\u003c\/span\u003e\u003cspan\u003e1.5%FS and r\u003cspan\u003eepeatability: \u003c\/span\u003e\u003cspan\u003e±0.2%FS\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: x-small; font-family: arial, helvetica, sans-serif;\"\u003eController 1: 0~100 SCCM\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: x-small; font-family: arial, helvetica, sans-serif;\"\u003eController 2: 1~199 SCCM\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: x-small; font-family: arial, helvetica, sans-serif;\"\u003eController 3: 1~199 SCCM\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: x-small; font-family: arial, helvetica, sans-serif;\"\u003eController 4: 1~499 SCCM\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eTouch screen panel to gas delivery parameters\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e RS485 port is installed for remote control by a PC\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eCustomized software is available to match receipts upon request at an extra cost.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eRange of each MFCs are interchangeable at an extra cost. \u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan\u003eVacuum Pump \u0026amp; Gauge\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; padding-bottom: 3px; letter-spacing: 0pt; padding-right: 15px; font-family: Arial; vertical-align: middle; word-spacing: 0pt; padding-top: 3px; border: 1px solid #4682b4;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eAn anti-corrosion vacuum gauge is included up to 10-5 torr\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eA vacuum pump is required but not included. Please click the link pics to order\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\n\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"64\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1.25.jpg\" title=\"\" width=\"96\"\u003e Vacuum gauge\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"61\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PumpFilter.final111.1_new.jpg\" title=\"\" width=\"92\"\u003e  Oil pump     \u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"62\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/250c.1.jpg\" title=\"\" width=\"93\"\u003eDry scroll pump\u003ca href=\"..\/..\/..\/Anti-CorrosiveCapacitanceDiaphragmGaugewithPowerSupply-EQ-PCG-554.aspx\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eProduct dimension\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: #4682b4 1px solid; padding: 3px 15px 3px 15px;\"\u003e\n\u003cdiv\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/size.5.png\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/size.5.png\"\u003e\u003c\/a\u003e Click the picture to see the detail.\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eNet weight\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: #4682b4 1px solid; padding: 3px 15px 3px 15px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e~ 500 Kg\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eShipping dimension\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: #4682b4 1px solid; padding: 3px 15px 3px 15px;\"\u003e\u003cspan style=\"color: #000000; font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan style=\"color: #000000;\"\u003e70\" x 70\" x 65\"\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eShipping weight\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: #4682b4 1px solid; padding: 3px 15px 3px 15px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e~600 Kg\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eWarranty\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: left; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: #4682b4 1px solid; padding: 3px 15px 3px 15px;\"\u003e\u003cspan style=\"color: #000000; font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan style=\"color: #000000;\"\u003e\u003cspan style=\"color: #000000;\"\u003eOne year limited warranty for electronic and mechanical part, excluding heating element and ceramic tube damaged by user\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"text-align: left; padding: 3px 15px; letter-spacing: 0pt; font-family: Arial; vertical-align: middle; word-spacing: 0pt; border: 1px solid #4682b4; width: 150px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eCompliance\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; border: 1px solid #4682b4; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 800px; background-color: #ffffff;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cstrong style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003eCE Certified\u003c\/span\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\n\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eNRTL or CSA certification is available upon reques\u003c\/span\u003et\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan face=\"Arial\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984817025163,"sku":"PECVD-8-12","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/GSL1100XIIISR.2.1_b42ebc5e-dc54-489c-9a69-93a962244207.jpg?v=1764850857","url":"https:\/\/mtimalaysia.com\/products\/small-batch-12-pcs-6-wafer-pecvd-system-ccp-type-for-pilot-test-pecvd-8-16","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}