{"product_id":"otf1200xsdfpesl","title":"1200C Dual Sliding Tube Furnace with 2 Tube \u0026 Flanges for PECVD - OTF1200XSDFPESL","description":"\u003cp\u003eOTF1200XSDFPESL is a \u003cspan style=\"color: rgb(255, 42, 0);\"\u003edual slidable PECVD (Plasma Enhanced Chemical Vapor Deposi tion) tube furnace system \u003c\/span\u003e. It is a tool for PECVD with 2\" ODx55\"L Quartz tube \u0026amp; flanges and a max 1200°C achievable working temperature. Two 2\" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation\/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C\/min.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS\u003c\/strong\u003e \u003cbr\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eFurnace Structure\u003c\/p\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF1200XS250SL.jpg?v=1706239564\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF1200XS250SL.jpg?v=1706239564\" width=\"168\" height=\"112\"\u003e\u003c\/a\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eBoth furnaces are double-layer steel structures with 1200°C max. working temperature.\u003c\/li\u003e\n\u003cli\u003eEach Furnace has a 200mm heating zone and a 60 mm long constant temperature zone.\u003c\/li\u003e\n\u003cli\u003eOne pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.\u003c\/li\u003e\n\u003cli\u003eVacuum flanges are installed for immediate use.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003ePower of furnace\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e AC 120 VAC or 208-240V Single Phase, 50\/60 Hz, 20 A air breaker required\u003c\/li\u003e\n\u003cli\u003e 2.5 KW in total\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eMax. Temperature\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e1200°C (\u0026lt;1 hour)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eContinuous Temperature\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e1100°C\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eHeating \u0026amp; Cooling Rates\u003c\/p\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-80SL-Plot.jpg?v=1706131614\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-80SL-Plot.jpg?v=1706131614\" width=\"169\" height=\"101\"\u003e\u003c\/a\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eHeating Rate:\u003c\/div\u003e\n\u003cdiv\u003e 15°C\/sec (RT - 150°C);\u003c\/div\u003e\n\u003cdiv\u003e 10°C\/sec (150°C - 250°C);\u003c\/div\u003e\n\u003cdiv\u003e7°C\/sec (250°C - 350°C);\u003c\/div\u003e\n\u003cdiv\u003e4°C\/sec (350°C - 500°C);\u003c\/div\u003e\n\u003cdiv\u003e3°C\/sec (350°C - 550°C);\u003c\/div\u003e\n\u003cdiv\u003e2°C\/sec (550°C - 650°C);\u003cbr\u003e1°C\/sec (650°C - 800°C);\u003cbr\u003e 0.5°C\/sec (800°C - 1000°C);\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003eCooling Rate:\u003c\/div\u003e\n\u003cdiv\u003e15°C\/sec (1000 - 950°C);\u003c\/div\u003e\n\u003cdiv\u003e10°C\/sec (950°C - 900°C);\u003c\/div\u003e\n\u003cdiv\u003e7°C\/sec (900°C - 850°C);\u003c\/div\u003e\n\u003cdiv\u003e4°C\/sec (850°C - 750°C);\u003c\/div\u003e\n\u003cdiv\u003e2°C\/sec (750°C - 600°C);\u003cbr\u003e1.5°C\/sec (600°C - 500°C);\u003cbr\u003e1°C\/sec (500°C - 400°C);\u003cbr\u003e0.5°C\/sec (400°C - 300°C);\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eNote:\u003c\/span\u003e\u003cbr\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eThe max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eHeating Zone Length\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e200mm( ~8\") for each furnace\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eConstant Temperature Zone\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e60 mm (+\/-1°C @ 400-1200°C)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003ePlasma RF Generator\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eOutput Power: \u003cstrong\u003e5 -300W\u003c\/strong\u003e adjustable with ± 1% stability\u003c\/li\u003e\n\u003cli\u003eRF frequency: 13.56 MHz ±0.005% stability\u003c\/li\u003e\n\u003cli\u003eReflection Power: 200W max.\u003c\/li\u003e\n\u003cli\u003eMatching: Automatic\u003c\/li\u003e\n\u003cli\u003eRF Output Port: 50 Ω, N-type, female\u003c\/li\u003e\n\u003cli\u003eNoise: \u0026lt;50 dB. \u003c\/li\u003e\n\u003cli\u003ePower: 208-240VAC, 50\/60Hz\u003c\/li\u003e\n\u003cli\u003eCooling: Air cooling.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eProcessing Tube Size\u003c\/p\u003e\n\u003cdiv\u003e\u003ca href=\"qztube-50ge-1800\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/thumb_quartz-tube-400w_100x100.jpg?v=1706297129\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eHigh purity fused quartz tube\u003c\/li\u003e\n\u003cli\u003eSize: 50mm O.D x 44mm I.D x1500 mm Length \u003c\/li\u003e\n\u003cli\u003eOptional: S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eTemperature Controller\u003c\/p\u003e\n\u003cdiv\u003e\u003ca href=\"https:\/\/mtixtl.com\/blogs\/knowledge-base\/furnace-controller?_pos=4\u0026amp;_sid=5ecf4e951\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/TCA-POPO_100x100.jpg\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cbr\u003e\n\u003cdiv\u003e\u003ca href=\"MTS01\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/thumb_temperature_control_system_100x100.jpg\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTwo furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.\u003c\/li\u003e\n\u003cli\u003eBuilt-in over-temperature alarm and protection allow for operation without an attendant.\u003c\/li\u003e\n\u003cli\u003eTwo K-type thermal couples are included\u003c\/li\u003e\n\u003cli\u003eTemperature Accuracy +\/ - 1°C\u003c\/li\u003e\n\u003cli\u003eOptional:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eThe furnace may be operated by a PC by installing a control module. Please order an \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"MTS01\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eMTS-01 control module\u003c\/a\u003e\u003c\/span\u003e at extra cost. \u003c\/li\u003e\n\u003cli\u003eWe recommend you order a computer (laptop) from us to avoid software installation problems.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003e Vacuum Flanges\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eOptional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost ( Pic.1) and water cold flange (Pic. 2).\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/search?q=Sealing+flanges+for+2%27%27+%2850mm%29+O.D+tube\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/502final_100x100.jpg\"\u003e\u003c\/a\u003e Pic. 1 \u003ca href=\"https:\/\/mtimalaysia.com\/products\/fg-50wc\"\u003e\u003cimg src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/EQFG50WC1.jpg?v=1764854073\u0026amp;width=3840\" alt=\"Water Cooled Sealing Flange for 50mm dia. Processing Tube - FG-50WC\" width=\"88\" height=\"59\"\u003e\u003c\/a\u003ePic. 2\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e Sliding Rails \/ Table\n\u003cdiv\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/track_clamp.jpg?v=1706135418\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/track_clamp_100x100.jpg\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eDouble sliding rail made of Cr-plated steel\u003c\/li\u003e\n\u003cli\u003eSliding length: 1200 mm\u003c\/li\u003e\n\u003cli\u003eTwo slide-stopping clamps are included for holding the position of the furnaces.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eOptional\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eMotorized sliding is available upon request (Pic. 1)\u003c\/li\u003e\n\u003cli\u003e1-9 channel gas mixing and delivery models are available (Pic.2)\u003c\/li\u003e\n\u003cli\u003eWater Chiller for the lab equipment that needs water cooling. (Pic.3)\u003c\/li\u003e\n\u003cli\u003eHeavy duty double stage rotary vane vacuum pump to get a high vacuum level (Pic.4)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF1200XS2SLM.jpg\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF1200XS2SLM.jpg\" width=\"106\" height=\"69\"\u003e\u003c\/a\u003e Pic. 1\u003ca href=\"https:\/\/mtimalaysia.com\/products\/gsl-lcd\"\u003e\u003cimg src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/plcmfc.jpg?v=1764850851\u0026amp;width=3840\" alt=\"2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software - GSL-LCD\" width=\"103\" height=\"69\"\u003e\u003c\/a\u003e Pic. 2\u003ca href=\"https:\/\/mtimalaysia.com\/products\/kj5000\"\u003e\u003cimg src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/KJ5000_Main_e5591917-0635-4886-8f7d-2c537aa4fc4d.jpg?v=1764854868\u0026amp;width=3840\" alt=\"Digital Temperature Controlled Recirculating Water Chiller with 16L \/ min Flow, 2.8K BTU\/hr-KJ5000\" width=\"111\" height=\"74\"\u003e\u003c\/a\u003e Pic. 3 \u003ca href=\"https:\/\/mtimalaysia.com\/products\/ytp-550-ld\"\u003e\u003cimg src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/EQ-YTP-550-LD.jpg?v=1764854876\u0026amp;width=3840\" alt=\"NRTL certified 240 L\/m Heavy Duty Double Stage Rotary Vane Vacuum Pump with Exhaust Filter - YTP-550-LD\" width=\"113\" height=\"75\"\u003e\u003c\/a\u003e Pic. 4\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eCompliance\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003eCE Certified\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003eNRTL or CSA certification is available at extra cost ($3500.00 for furnace ONLY).\u003cstrong\u003e\u003cbr\u003e\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003cli\u003ePlasma Generator is CE ONLY\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eApplication Notes\u003c\/p\u003e\n\u003cdiv\u003e\u003ca href=\"cga580\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQGRCGA580_100x100.jpg\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cp\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"cga580\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eClick here to learn the installation of a gas regulator\u003c\/a\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cspan\u003eTube furnaces with quartz tubes are designed for use under vacuum and low pressure \u0026lt;  \u003c\/span\u003e\u003cspan\u003e0.2 bar \/ 3 psi \/ 0.02 MPa\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cem\u003e\u003cspan\u003e\u003cstrong\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eA\u003c\/span\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003ettention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.\u003c\/span\u003e \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"cga580\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eClick here to learn about the installation of a gas regulator.\u003c\/a\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/em\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eThe flow rate for gasses should be limited to \u0026lt; 200 SCCM (or 200 ml\/min) for reducing thermal shocks to the tube\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eVacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\n\u003cspan\u003eClick here to learn \u003c\/span\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/howto-tube.pdf?v=1714583100\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eHow to set up quartz\/ ceramic tube and vacuum flange for MTI Tube furnace.\u003c\/a\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eWarning\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eFast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gear such as heat resistant suit \u0026amp; gloves if you intend to do so. \u003cstrong\u003e\u003cem\u003eDO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!\u003c\/em\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984818565259,"sku":"OTF1200XSDFPESL","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/OTF-1200X-S-50-PE-DFSL_bef33048-2cf5-46b7-9f96-769d39e030b2.jpg?v=1764850862","url":"https:\/\/mtimalaysia.com\/products\/otf1200xsdfpesl","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}