{"product_id":"otf-pecvd-rf","title":"300W 13.56MHz RF Generator for 50 or 80 mm OD Tube Furnace - OTF-PECVD-RF","description":"\u003cp\u003e13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS \u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 927px; height: 600px; border: 1px solid #0099cc;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eNoise\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u0026lt;50 dB\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOutput Power\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e5 -300W adjustable with ± 1% stability\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eRF frequency\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e13.56 MHz ±0.005% stability\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eReflection Power\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e200W max.\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eMatching\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eAutomatic matching\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eRF Output Port\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e50 Ω, N-type, female\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eCooling\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eAir cooling\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003ePower\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e208-240VAC, 50\/60Hz\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eTube Size\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e50, 80 or 125 mm OD please select from option bar  ( larger diameter coil up to 11\" diameter is available upon request )\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eApplication\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eCombine with MTI's tube furnace to get PECVD system\u003cbr\u003e\u003cimg height=\"80\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PECVDnewmodules.3.jpg\" style=\"border-image: initial; border: 1px solid black;\" width=\"120\"\u003e   \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PECVDnewmodules2.1.jpg\" width=\"150px\"\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eDimension\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTFPECVDRFDimension.jpg\" rel=\"prettyPhoto[products]\" title=\"\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTFPECVDRFDimension.jpg\" style=\"border: 1px solid black;\" title=\"Click to enlarge\" width=\"150px\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cbr\u003e\u003cbr\u003eOptional\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003ePlease order the oilless pump for zero contamination, quartz tubes, and vacuum flanges can be ordered by clicking the pictures below:\u003cbr\u003e\u003cimg height=\"80\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/oillesspump.1.jpg\" style=\"border-image: initial; border: 1px solid black;\" width=\"120\"\u003e     \u003cimg alt=\"Sealing flanges for 40 - 42 mm O.D tube\" height=\"80\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/thumb_1300-flange.bmp\" style=\"border-image: initial; border: 1px solid black;\" width=\"115\"\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eWarranty \u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOne year limited warranty with lifetime support\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"50mm OD","offer_id":44984811782283,"sku":"OTF50RF","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"80mm OD","offer_id":44984811815051,"sku":"OTF80RF","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/OTFPECVDRF.1_9fa6b86d-89f4-4745-b2e1-fd1ab06fecf2.jpg?v=1764850849","url":"https:\/\/mtimalaysia.com\/products\/otf-pecvd-rf","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}