{"product_id":"otf-1200x-rtp-ii","title":"Two Zones CSS Furnace for Rapid Thermal Processing Up to 3\" Dia. and Max. 650°C. - OTF-1200X-RTP-II","description":"OTF-1200X-RTP-II is a two-heating zone rapid thermal processing furnace with 11\" O.D quartz tube. It is designed for PVD or CSS ( Close Spaced Sublimation ) film coating up to 3\" diameter or 2\"x2\" square. The furnace is heated by two groups of halogen heaters (Top and Bottom) separately with max. 20ºC\/s heating rate. Two 30-segment precision temperature controllers are built-in with +\/-1ºC accuracy. RS485 port and control software are included to allow for the operation of the furnace and temperature profile logging via PC. It is an excellent tool to research new generation thin films for solar cells, such as CdTe, Sulfide, and Perovskite solar cells. It also can be used as RTP for annealing of thin film SPECIFICATIONS: Furnace structure \u0026amp; Vacuum Chamber A dual Heater, two temperature controllers, and two-channel gas flowmeters are integrated into a mobile aluminum alloy frame The chamber is made of high purity fused quartz tube Quartz tube size: 11\" OD\/10.8\" ID x 9\" H Carbon fiber felt as thermal insulation The vacuum flanges are made of Stainless Steel 316 Overall dimension: 850(L)×745(W)×1615(H) mm Vacuum Flanges Top Flange with one KFD-25 vacuum port and two gas outlets (1\/4\" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily The bottom flange has one KFD-25 vacuum port with two gas inlets (1\/4\" pipe required) and needle valves The flange is sealed by double silicone o-rings and can achieve maximum vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump Precision anti-corrosion digital vacuum gauge is in standard package (Since 2016.03.24) . Gas Flow Meters Two float meters are installed on the control panel with a measurement range of: 16 -160 mL\/m 400 - 4000 mL\/m (for purging purpose) Heater and Sample Holder Two shortwave IR lamps as heating elements for fast heating. The distance between two heaters is adjustable from 10 - 50 mm The heaters are made of stainless steel with a water cold jacket to reduce heat radiation and allow for fast cooling 3\" round wafer holder is built-in with the top heater to load the substrate One high thermal conductive AlN plate (3\"Dia x 0.5mm Thick) is included, which shall put on the back of the substrate to make it heated uniformly One 3\" graphite plate can be used alternatively for the AIN plate, please click the picture below to order. Halogen Light Heater replacement is available at extra cost, please click here to order. Temperature Controller Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters Each controller has PID auto-tune function to protect heaters from overshooting and alarm function to avoid overheating and the thermal couple broke PC communication interface \u0026amp; software is installed Working Temperature Maximum temperature for each heater: \u0026lt;= 650ºC The maximum temperature difference between two heaters: \u0026lt;= 300ºC depends on the spacing between two heaters: Spacing 30mm Max. temp difference: 315ºC @ heating bottom only Spacing 40mm Max. temp difference: 350ºC @ heating bottom only Spacing 50mm Max. temp difference: 395ºC @ heating bottom only Heating \u0026amp; Cooling Rate Heating: \u0026lt; 8ºC\/s ( heating single heater only ) Cooling: \u0026lt; 10ºC\/s (600 - 100ºC) Max. Thermal Couple Two K-type thermal couples (exposed) are installed on top and bottom heaters separately Working Voltage 208 - 240VAC, single-phase, 20A air breaker Power Requirement 2200W total ( 1100W for each heater ) Optional One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach \u0026lt; = 10E-2 torr by mechanical pump If you run corrosive gas, please consider using an anti-corrosive dry pump is shown in the second picture from the left below ( Pfeiffer pump from Germany ) at extra cost You may order a recirculating water chiller for saving water sources separately You may choose a digital MFC gas delivery system by clicking the first picture from the right below Compliance CE Certified NRTL or CSA Certification is available upon request, additional charges will apply Note The tube furnaces with quartz tubes are designed for use under vacuum and low pressure \u0026lt; 0.2 bars \/ 3 psi Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to \u0026lt; 200 SCCM for reducing thermal shocks to the tube. . Reference Articles Please read the article: High-efficiency CSS CdTe Solar Cell UCLA researchers improve the process for manufacturing highly efficient solar cells Planar Heterojunction Perovskite Solar Cells via Vapor-Assisted Solution Process Sub 150 °C Processed Meso-superstructure Perovskite Solar Cells with Enhanced Efficiency Best_Research-Cell_Efficiencies Thin-film Sb2Se3 photovoltaics with oriented one-dimensional ribbons and benign grain boundaries\u003cbr\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eFurnace structure \u0026amp; Vacuum Chamber\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSS5-1.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSS5-1_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSS5-1.jpg\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eA dual Heater, two temperature controllers, and two-channel gas flowmeters are integrated into a mobile aluminum alloy frame\u003c\/li\u003e\n\u003cli\u003eThe chamber is made of high purity fused quartz tube\u003c\/li\u003e\n\u003cli\u003eQuartz tube size: 11\" OD\/10.8\" ID x 9\" H\u003c\/li\u003e\n\u003cli\u003eCarbon fiber felt as thermal insulation\u003c\/li\u003e\n\u003cli\u003eThe vacuum flanges are made of Stainless Steel 316\u003c\/li\u003e\n\u003cli\u003eOverall dimension: 850(L)×745(W)×1615(H) mm\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv style=\"text-align: start;\"\u003eVacuum Flanges\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSS7.jpg\" rel=\"lightbox\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSS7_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e    \u003ca href=\"pgc554ld\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1.25_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTop Flange with one KFD-25 vacuum port and two gas outlets (1\/4\" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily\u003c\/li\u003e\n\u003cli\u003eThe bottom flange has one KFD-25 vacuum port with two gas inlets (1\/4\" pipe required) and needle valves\u003c\/li\u003e\n\u003cli\u003eThe flange is sealed by double silicone o-rings and can achieve maximum vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump \u003c\/li\u003e\n\u003cli\u003ePrecision anti-corrosion digital vacuum gauge is in standard package \u003cstrong\u003e(Since 2016.03.24)\u003c\/strong\u003e.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eGas Flow Meters\u003c\/div\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"eq-fm-160cc-rtp\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQFM160CC_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTwo float meters are installed on the control panel with a measurement range of:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e16 -160 mL\/m \u003c\/li\u003e\n\u003cli\u003e400 - 4000 mL\/m (for purging purpose) \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeater and Sample Holder\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSS4.jpg?v=1706210297\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSS4_50x50.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e    \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/css1.png\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/css1_50x50.png\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003ca href=\"g-holder\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/G-holder_50x50.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTwo shortwave IR lamps as heating elements for fast heating.\u003c\/li\u003e\n\u003cli\u003eThe distance between two heaters is adjustable from 10 - 50 mm\u003c\/li\u003e\n\u003cli\u003eThe heaters are made of stainless steel with a water cold jacket to reduce heat radiation and allow for fast cooling\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e3\" round wafer holder\u003c\/strong\u003e is built-in with the top heater to load the substrate\u003c\/li\u003e\n\u003cli\u003eOne high thermal conductive AlN plate (3\"Dia x 0.5mm Thick) is included, which shall put on the back of the substrate to make it heated uniformly\u003c\/li\u003e\n\u003cli\u003eOne 3\" graphite plate can be used alternatively for the AIN plate, please click the picture below to order.\u003c\/li\u003e\n\u003cli\u003eHalogen Light Heater replacement is available at extra cost, please \u003ca href=\"rtp-1200x-hl\" rel=\"noopener\" target=\"_blank\"\u003eclick here\u003c\/a\u003e to order.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTemperature Controller\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Temperature_Control.jpg?v=1706135240\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Temperature_Control_50x50.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e   \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSSCurve.png?v=1706210297\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CSSCurve_50x50.png\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Temperature_Control.jpg\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTwo precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters\u003c\/li\u003e\n\u003cli\u003eEach controller has PID auto-tune function to protect heaters from overshooting and alarm function to avoid overheating and the thermal couple broke\u003c\/li\u003e\n\u003cli\u003ePC communication interface \u0026amp; software is installed \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cbr\u003e\u003cbr\u003eWorking Temperature\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eMaximum temperature for each heater: \u0026lt;= 650ºC\u003c\/li\u003e\n\u003cli\u003eThe maximum temperature difference between two heaters: \u0026lt;= 300ºC depends on the spacing between two heaters:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eSpacing 30mm Max. temp difference: 315ºC @ heating bottom only\u003c\/li\u003e\n\u003cli\u003eSpacing 40mm Max. temp difference: 350ºC @ heating bottom only\u003c\/li\u003e\n\u003cli\u003eSpacing 50mm Max. temp difference: 395ºC @ heating bottom only\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeating \u0026amp; Cooling Rate\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eHeating: \u0026lt; 8ºC\/s ( heating single heater only )\u003c\/li\u003e\n\u003cli\u003eCooling: \u0026lt; 10ºC\/s (600 - 100ºC) Max.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003ca href=\"tck18srtp\" rel=\"noopener\" target=\"_blank\"\u003eThermal Couple\u003c\/a\u003e\u003c\/td\u003e\n\u003ctd\u003eTwo K-type thermal couples (exposed) are installed on top and bottom heaters separately\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWorking Voltage\u003c\/td\u003e\n\u003ctd\u003e208 - 240VAC, single-phase, 20A air breaker\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Requirement\u003c\/td\u003e\n\u003ctd\u003e2200W total ( 1100W for each heater )\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eOptional\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eOne vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach \u0026lt; = 10E-2 torr by mechanical pump \u003c\/li\u003e\n\u003cli\u003eIf you run corrosive gas, please consider using an anti-corrosive dry pump is shown in the second picture from the left below ( Pfeiffer pump from Germany ) at extra cost\u003c\/li\u003e\n\u003cli\u003eYou may order a recirculating water chiller for saving water sources separately\u003c\/li\u003e\n\u003cli\u003eYou may choose a digital MFC gas delivery system by clicking the first picture from the right below\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"fyp\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-FYP-Pump.1_5b10ca22-5afa-4a0b-9ea5-3d4974c086ec_100x100.jpg?v=1706220208\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e    \u003ca href=\"kj5000\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-KJ5000-220-hide_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e   \u003ca href=\"gsl-lcd\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/MFCCC.1_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003eCE Certified\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003eNRTL or CSA Certification is available upon request, \u003cstrong\u003eadditional charges will apply\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNote\u003cbr\u003e\u003ca href=\"cga580\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQGRCGA580_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe tube furnaces with quartz tubes are designed for use under vacuum and low pressure \u0026lt; 0.2 bars \/ 3 psi\u003c\/li\u003e\n\u003cli\u003eVacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to \u0026lt; 200 SCCM for reducing thermal shocks to the tube.\u003cem\u003e\u003cstrong\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/twostagebrass0-100psianalyticalcylinderregulatorcga-580withneedlevalve-fa-y12244d580.aspx\"\u003e.\u003c\/a\u003e\u003c\/strong\u003e\u003c\/em\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eReference Articles\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\u003ca href=\"http:\/\/www.sciencedirect.com\/science\/article\/pii\/S004060909900824X\"\u003ePlease read the article: High-efficiency CSS CdTe Solar Cell\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"http:\/\/newsroom.ucla.edu\/portal\/ucla\/ucla-researchers-improve-process-249884.aspx\"\u003eUCLA researchers improve the process for manufacturing highly efficient solar cells\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"http:\/\/pubs.acs.org\/doi\/abs\/10.1021\/ja411509g\"\u003ePlanar Heterojunction Perovskite Solar Cells via Vapor-Assisted Solution Process\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"http:\/\/pubs.rsc.org\/en\/Content\/ArticleLanding\/2013\/EE\/C3EE43707H#!divAbstract\"\u003eSub 150 °C Processed Meso-superstructure Perovskite Solar Cells with Enhanced Efficiency \u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Best_ResearchCell_Efficiencies.png\"\u003eBest_Research-Cell_Efficiencies\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Thin-film_Sb2Se3_photovoltaics_with_oriented_one-dimensional_ribbons_and_benign_grain_boundaries.pdf?v=1746737399\" rel=\"noopener\" target=\"_blank\"\u003eThin-film Sb2Se3 photovoltaics with oriented one-dimensional ribbons and benign grain boundaries\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44985158500491,"sku":"OTF1200XIIRTP","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/OTF-1200X-RTP-II_e9ae20cf-f759-49ae-a64d-fc9ec2ca26e0.jpg?v=1764854739","url":"https:\/\/mtimalaysia.com\/products\/otf-1200x-rtp-ii","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}