{"product_id":"otf-1200x-ii-pec4sl-ld","title":"1200C Max. Slid-able Dual Zone PECVD Furnace w\/ Gas Delivery \u0026 Vacuum Pump - OTF-1200X-II-PEC4SL-LD","description":"\u003cp\u003eOTF-1200X-II-PEC4SL is a multi-zone slidable PE-CVD tube furnace system consisting of a 300W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene with the following benefits:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eLower temperature processing compared to conventional CVD\u003c\/li\u003e\n\u003cli\u003eHigh heating \u0026amp; cooling rate using a sliding furnace\u003c\/li\u003e\n\u003cli\u003eEach heating zone to create a thermal gradient up to 200ºC\u003c\/li\u003e\n\u003cli\u003e1100ºC Max. working temperature\u003c\/li\u003e\n\u003cli\u003eOffers a wide range of material deposition, such as Carbon \u0026amp; ZnO nanowire (or tube) and single-layer graphene\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS\u003c\/strong\u003e \u003cbr\u003e\u003c\/p\u003e\n\u003ctable style=\"width: 126.786%; height: 2573px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 39.1875px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 39.1875px;\"\u003e\n\u003cdiv\u003eModel\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 33.0269%; height: 39.1875px;\"\u003e OTF-1200X-II-50-PEC4SL\u003c\/td\u003e\n\u003ctd style=\"width: 27.4968%; height: 39.1875px;\"\u003eOTF-1200X-II-80-PEC4SL\u003c\/td\u003e\n\u003ctd style=\"width: 24.5782%; height: 39.1875px;\"\u003eOTF-1200X-III-5-PEC4SL\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 58.7812px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 58.7812px;\"\u003e\n\u003cdiv\u003eTube Size \u003cbr\u003e(Pls select in options bar)\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 33.0269%; height: 58.7812px;\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"qztube-50ge-1800\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003e2\" (50mm) OD x 1.7\" ID x 71\" Length\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 27.4968%; height: 58.7812px;\"\u003e\n\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"qztube-80d-1800\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003e3.14\" (80mm) OD x2.83\" ID x71'' L\u003c\/a\u003e\u003c\/span\u003e \u003c\/td\u003e\n\u003ctd style=\"width: 24.5782%; height: 58.7812px;\"\u003e5\" (130mm) OD x 4.8\" ID x 79'' Length\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 19.5938px;\"\u003e\n\u003cdiv\u003eFurnace\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 33.0269%; height: 19.5938px;\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"otf1200xii\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eOTF-1200X-II-50\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 27.4968%; height: 19.5938px;\"\u003e\n\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"otf1200xii\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eOTF-1200X-II-80\u003c\/a\u003e\u003c\/span\u003e\u003ca href=\"otf1200xii\" rel=\"noopener\" target=\"_blank\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 24.5782%; height: 19.5938px;\"\u003e\u003ca href=\"otf-1200x-iii-s-ul\" rel=\"noopener\" target=\"_blank\"\u003eOTF-1200X-III-S-130\u003c\/a\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 537.438px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 537.438px;\"\u003e\n\u003cdiv\u003e\n\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eFeatures\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 33.0269%; height: 537.438px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo programmable precision temp. controllers with 30 segments.\u003c\/li\u003e\n\u003cli\u003eTwo separately controlled Heating Zones:\u003c\/li\u003e\n\u003cli\u003e200mm length for each heating zone\u003c\/li\u003e\n\u003cli\u003e400mm total in heating length\u003c\/li\u003e\n\u003cli\u003e250mm constant temperature heating area if both zones were heated at the same temperature\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 27.4968%; height: 537.438px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo programmable precision temp. controllers with 30 segments.\u003c\/li\u003e\n\u003cli\u003eTwo separately controlled Heating Zones: \u003c\/li\u003e\n\u003cli\u003e200mm length for each heating zone\u003c\/li\u003e\n\u003cli\u003e400mm total in heating length\u003c\/li\u003e\n\u003cli\u003e250mm constant temperature heating area if both zones were heated at the same temperature\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 24.5782%; height: 537.438px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThree programmable precision temp. controllers with 30 segments.\u003c\/li\u003e\n\u003cli\u003eThree separately controlled Heating Zones: \u003c\/li\u003e\n\u003cli\u003e200mm length for each heating zone\u003c\/li\u003e\n\u003cli\u003e600mm total in heating length\u003c\/li\u003e\n\u003cli\u003e480mm constant temperature heating area if all zones were heated at the same temperature\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 125.969px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 125.969px;\"\u003e\n\u003cdiv\u003e\n\u003cbr\u003e\u003cbr\u003eFurnace Structures\u003cbr\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/otf-1200x3-iisplitdualzonetubefurnacewithvacuumflangesand32580mmquartztube.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"3\" style=\"width: 85.1019%; height: 125.969px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eSplit tube furnace with sliding rail\u003c\/li\u003e\n\u003cli\u003eMax 1100ºC for continuous heating\u003c\/li\u003e\n\u003cli\u003eMulti-programmable precision digital temperature controllers with 30 segments.\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv\u003eInput power: 208 – 240V AC input, a single phase at max. 4KW\u003c\/div\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 184.75px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 184.75px;\"\u003e\n\u003ca href=\"http:\/\/www.mtixtl.com\/500W13.56MHzPECVDRFPowerSupplyfor2-3.14ODTubeFurnaceOTF-PE.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003ePlasma RF Power Supply\u003cbr\u003e\u003ca href=\"otf-pecvd-rf\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/RF_Power_Supply_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/500W13.56MHzPECVDRFPowerSupplyfor2-3.14ODTubeFurnaceOTF-PE.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"3\" style=\"width: 85.1019%; height: 184.75px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eOutput Power: 5 -300W adjustable with ± 1% stability.\u003c\/li\u003e\n\u003cli\u003eRF frequency: 13.56 MHz ±0.005% stability.\u003c\/li\u003e\n\u003cli\u003eReflection Power: 200W max.\u003c\/li\u003e\n\u003cli\u003eMatching: Automatic\u003c\/li\u003e\n\u003cli\u003eRF Output Port: 50 Ω, N-type, female\u003c\/li\u003e\n\u003cli\u003eNoise: \u0026lt;50 dB.\u003c\/li\u003e\n\u003cli\u003eCooling: Air cooling.\u003c\/li\u003e\n\u003cli\u003ePower: 208-240VAC, Single Phase, 50\/60Hz\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 188.406px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 188.406px;\"\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003cbr\u003eAnti-corrosive Pressure Gauge\u003cbr\u003e\u003ca href=\"pgc554ld\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1.25_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"3\" style=\"width: 85.1019%; height: 188.406px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e3.8x10\u003csup\u003e-5\u003c\/sup\u003e to 1125 Torr measurement range\u003c\/li\u003e\n\u003cli\u003eAnti-corrosive, gas-type independent \u003c\/li\u003e\n\u003cli\u003eHigh accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection\u003c\/li\u003e\n\u003cli\u003eFast atmospheric detection eliminates waiting time and shortens the process cycle\u003c\/li\u003e\n\u003cli\u003eEasy to exchange plug \u0026amp; play sensor element\u003c\/li\u003e\n\u003cli\u003eClick the pic to view the detail spec.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 159.375px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 159.375px;\"\u003e\n\u003cdiv\u003eVacuum Pump Station and Valves\u003c\/div\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"VBS-M1-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vacuum-M_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"3\" style=\"width: 85.1019%; height: 159.375px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eHeavy-Duty Rotary Vane Vacuum Pump (7.8 CFM, 240 L\/m) with Two-Stage Exhaust System installed in the bottom case\u003c\/li\u003e\n\u003cli\u003eKF25 adapter and stainless steel pipe are connected between the pump and tube flange with a ball valve for the customer's plug and play\u003c\/li\u003e\n\u003cli\u003e10E-2 Torr vacuum can be achieved inside the processing tube\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 441.109px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 441.109px;\"\u003e\n\u003cdiv\u003e \u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eMass Flowmeters \u0026amp; Gas Mixing Station\u003c\/div\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003ca href=\"gsl-lcd\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sfdfsdfs_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e    \u003cstrong\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Flow4.png\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Flow4_100x100.png?ts=129931236595714663\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003cbr\u003e\u003cbr\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/Bubbler\/Evaporatorforliquidsourcesandchemicalprecursors-BL-SS.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"3\" style=\"width: 85.1019%; height: 441.109px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eIt is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. The LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel.\u003c\/li\u003e\n\u003cli\u003eWorking Temperature: 5~45 ºC\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eMax. Pressure: 3x10\u003csup\u003e6 \u003c\/sup\u003ePa\u003c\/li\u003e\n\u003cli\u003eAccuracy: ±1.5% FS\u003c\/li\u003e\n\u003cli\u003eLiner: ±0.5-1.5%F.S.\u003c\/li\u003e\n\u003cli\u003eDuplicate accuracy: ±0.2%F.S.\u003c\/li\u003e\n\u003cli\u003eControlling Range:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eController 1: 0~100 SCCM\u003c\/li\u003e\n\u003cli\u003eController 2: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 3: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 4: 1~499 SCCM\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003cli\u003eClick the picture left below to order bubbler or evaporator for CVD constant pressure control module\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"https:\/\/mtimalaysia.com\/products\/bl-ss\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/blss600main_00f8dab7-6e98-44c7-a626-94d9e9a1bd98.jpg?v=1764850602\u0026amp;width=3840\" alt=\"Stainless Steel Bubbler for CVD Liquid Precursors (150, 300, 600 or 1000ml) - BLSS\" width=\"111\" height=\"74\"\u003e\u003c\/a\u003e    \u003ca href=\"https:\/\/mtimalaysia.com\/products\/lvd-f1\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/LVD-F1_Main_86f3fdf7-2c0c-4e15-ba0a-1e51a3d38ec0.jpg?v=1764850844\u0026amp;width=3840\" alt=\"Compact Liquid Vaporization Systems with Temperature and Pressure Control for CVD \u0026amp; DLCVD - LVD-F1\" width=\"92\" height=\"61\"\u003e\u003c\/a\u003e\u003cstrong\u003e   \u003ca href=\"https:\/\/mtimalaysia.com\/products\/kjt2v\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/KJT2Vmain.2_4efb68fb-350e-46ec-9225-c0da729155e2.jpg?v=1764850606\u0026amp;width=3840\" alt=\"Automatic Pressure Control Kit for MTI Glovebox or Tube Furnace - KJT2V\" width=\"113\" height=\"75\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/compactdigitalvacuumgaugeandcontrollerwithpowersupply-upto10e-4torr-1.aspx\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 371.094px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 371.094px;\"\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eHeating \u0026amp; Cooling Rates\u003ca href=\"http:\/\/www.mtixtl.com\/temperaturecontrolsystemforcontrollingmtisfurnacebyusingcomputereq-mts02.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-80SL-Plot.jpg?v=1706131614\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-80SL-Plot_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"3\" style=\"width: 85.1019%; height: 371.094px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eRS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one from \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"MTS02\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003ehere\u003c\/a\u003e \u003c\/span\u003e)\u003c\/li\u003e\n\u003cli\u003eIn order to achieve Max. heating rate, the user must preheat the furnace to the desired temperature, then slide the furnace to the sample zone of the tube\u003c\/li\u003e\n\u003cli\u003eIn order to achieve the Max. cooling rate, move the heated furnace from hot zone to cold zone\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eHeating Rate:\u003c\/div\u003e\n\u003cdiv\u003e15°C\/sec (RT - 150°C);\u003c\/div\u003e\n\u003cdiv\u003e10°C\/sec (150°C - 250°C);\u003c\/div\u003e\n\u003cdiv\u003e7°C\/sec (250°C - 350°C);\u003c\/div\u003e\n\u003cdiv\u003e4°C\/sec (350°C - 500°C);\u003c\/div\u003e\n\u003cdiv\u003e3°C\/sec (350°C - 550°C);\u003c\/div\u003e\n\u003cdiv\u003e2°C\/sec (550°C - 650°C);\u003cbr\u003e1°C\/sec (650°C - 800°C);\u003cbr\u003e0.5°C\/sec (800°C - 1000°C);\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003eCooling Rate:\u003c\/div\u003e\n\u003cdiv\u003e15°C\/sec (1000 - 950°C);\u003c\/div\u003e\n\u003cdiv\u003e10°C\/sec (950°C - 900°C);\u003c\/div\u003e\n\u003cdiv\u003e7°C\/sec (900°C - 850°C);\u003c\/div\u003e\n\u003cdiv\u003e4°C\/sec (850°C - 750°C);\u003c\/div\u003e\n\u003cdiv\u003e2°C\/sec (750°C - 600°C);\u003cbr\u003e1.5°C\/sec (600°C - 500°C);\u003cbr\u003e1°C\/sec (500°C - 400°C);\u003cbr\u003e0.5°C\/sec (400°C - 300°C);\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.7812px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 86.7812px;\"\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003cspan\u003eCompliance\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"3\" style=\"width: 85.1019%; height: 86.7812px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan\u003e\u003cstrong\u003eCE Certified\u003c\/strong\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eNRTL (UL61010) or CSA certification is available upon request at extra cost.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 381.688px;\"\u003e\n\u003ctd style=\"width: 14.1324%; height: 381.688px;\"\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003cspan\u003eApplication Notes\u003c\/span\u003e\u003cbr\u003e\u003ca href=\"cga580\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" class=\"product-list-img\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQGRCGA580_100x100.jpg?v=1706220710\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003ca href=\"cga580\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eClick here to learn\u003c\/span\u003e\u003c\/span\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"color: rgb(43, 0, 255);\"\u003e the installation of a gas regulator\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"3\" style=\"width: 85.1019%; height: 381.688px;\"\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan\u003eTube furnaces with quartz tubes are designed for use under vacuum and low pressure \u0026lt; 0.02 MPa (relative P) \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\n\u003cspan\u003e\u003c\/span\u003e\n\u003cdiv\u003e\u003cspan\u003e\u003cimg\u003e\u003cem\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cstrong\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eAttention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation\u003c\/span\u003e. \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"cga580\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eClick here to learn the installation of a gas regulator.\u003c\/a\u003e\u003c\/span\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/em\u003e\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eThe flow rate for gasses should be limited to \u0026lt; 200 SCCM (or 200 ml\/min) for reducing thermal shocks to the tube\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eClick here to learn \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/howto-tube.pdf?v=1714583100\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eHow to set up a quartz\/ ceramic tube and vacuum flange for the MTI Tube furnace\u003c\/a\u003e\u003c\/span\u003e. \u003cspan style=\"color: rgb(255, 42, 0);\"\u003eVacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eMTI reserves the right to modify its PE-CVD design at any time without notice but promises quality in future designs that meet and exceed the specifications above.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eFor operating the PECVD system with a tube size larger than 4\", please always keep more than 1-meter distance from the plasma source after the plasma generator starts working\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"MTI","offers":[{"title":"2\" (50mm) OD x 1.7\" ID x 71\" Length","offer_id":44984816894091,"sku":"OTF-1200X-II-50-PEC4SL","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"5\" (130mm) OD x 4.8\" (120mm) ID x 79\" Length","offer_id":44984816926859,"sku":"OTF1200XIIIPEC4SL5","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"3.14\" (80mm) OD x 2.83\" ID x 71\" Length","offer_id":44984816959627,"sku":"OTF1200XIIPEC4OVSL","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/OTF-1200X-II-PEC4SL_548fb40f-777c-436d-9a6f-abefb785e96f.jpg?v=1764850857","url":"https:\/\/mtimalaysia.com\/products\/otf-1200x-ii-pec4sl-ld","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}