{"product_id":"otf-1200x-ald","title":"ALD \u0026 PECVD Combination Tube Furnace System - OTF-1200X-ALD","description":"\u003cp\u003e\u003cspan\u003eOTF-1200X-ALD is a dual zone tube furnace combining \u003c\/span\u003e\u003cstrong\u003eALD\u003c\/strong\u003e\u003cspan\u003e ( Atomic Layer Deposition ) and\u003c\/span\u003e\u003cstrong\u003e\u003cspan\u003e \u003c\/span\u003ePECVD\u003c\/strong\u003e\u003cspan\u003e ( plasma enhanced chemical vapor deposition )\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e for preparing new generation thin film\u003c\/span\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eTwo 10 ms ALD valves for ultra-thin film deposition\u003c\/li\u003e\n\u003cli\u003eLower temperature processing is required compared to the conventional CVD\u003c\/li\u003e\n\u003cli\u003eHigh heating \u0026amp; cooling rate using sliding furnace\u003c\/li\u003e\n\u003cli\u003eDual heating zone to create thermal gradient up to 500ºC \u003c\/li\u003e\n\u003cli\u003e1100ºC Max. working temperature in the tube furnace\u003c\/li\u003e\n\u003cli\u003e1100ºC Max. working temperature in pre-heater for heating vapor phase or evaporating solid materials\u003c\/li\u003e\n\u003cli\u003eRapid cooling \u0026amp; Heating for growing 2D materials\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eControl Pannel\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eAll parameters of Vapor , ALD and Plasma are controlled by PLC via a 6\" touch screen pannel\u003c\/li\u003e\n\u003cli\u003ePlease click picture below to see control inter face\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca rel=\"lightbox\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDSystem.jpg\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDSystem_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eALD valve\u003cbr\u003e\u003ca rel=\"noopener\" href=\"6LVV-ALD3FR4-P-C-LD\" target=\"_blank\"\u003e\u003cimg title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/6LVVALD3TFR4PCV.1_100x100.jpg\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTwo ALD valves with pulse controller (min 10 ms duration )\u003c\/li\u003e\n\u003cli\u003e6\" touch screen control pannel\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eLiquid-Vapor Generator\u003cbr\u003e\u003ca rel=\"noopener\" href=\"lvd-f1\" target=\"_blank\"\u003e\u003cimg title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4_100x100.jpg\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eAutomatic liquid vapor generator is included and connect to ALD valve\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eDual Zone Split Tube furnace \u003cbr\u003e\u003ca rel=\"noopener\" href=\"otf1200xii\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF1200XII.1_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/otf-1200x3-iisplitdualzonetubefurnacewithvacuumflangesand32580mmquartztube.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eMax 1100ºC for continuous heating\u003c\/li\u003e\n\u003cli\u003eTwo programmable precision digital temperature controllers with 30 segments.\u003c\/li\u003e\n\u003cli\u003eTwo separate controlled Heating Zones\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e200mm length for each heating zone\u003c\/li\u003e\n\u003cli\u003e400mm total in heating length\u003c\/li\u003e\n\u003cli\u003e250mm constant central temperature heating area if both zones were heated at the same temperature\u003c\/li\u003e\n\u003cli\u003e500ºC max temperature difference between two zones with thermal blocks in between\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eInput power: 208 – 240V AC input, single phase at max. 4KW\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cbr\u003ePlasma RF Power Supply\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eOutput Power: 5 -500W adjustable with ± 1% stability.\u003c\/li\u003e\n\u003cli\u003eRF frequency: 13.56 MHz ±0.005% stability.\u003c\/li\u003e\n\u003cli\u003eReflection Power: 200W max.\u003c\/li\u003e\n\u003cli\u003eMatching: Automatic\u003c\/li\u003e\n\u003cli\u003eRF Output Port: 50 Ω, N-type, female\u003c\/li\u003e\n\u003cli\u003eNoise: \u0026lt;50 dB.\u003c\/li\u003e\n\u003cli\u003eCooling: Air cooling.\u003c\/li\u003e\n\u003cli\u003ePower: 208-240VAC, Single Phase, 50\/60Hz\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003ePre-heating furnace\u003cbr\u003e\u003ca rel=\"noopener\" href=\"otf-1200x-s\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CE2.1.2.3_100x100.jpg?v=1706210190\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSmall tube furnace with 200mm length single heating zone\u003c\/li\u003e\n\u003cli\u003eMax. temperature: 1100ºC\u003c\/li\u003e\n\u003cli\u003e30 segment programmable temperature control\u003c\/li\u003e\n\u003cli\u003eVapor go through the heater first before get in RF Plasma generator.\u003c\/li\u003e\n\u003cli\u003eCan put solid material in the heater for evaporation and mixing with vapor phase.\u003c\/li\u003e\n\u003cli\u003eQuartz Tube: 50mm OD x 44mm ID x 2200 mm L ( 80mm OD tube is available at extra cost\u003c\/li\u003e\n\u003cli\u003eVacuum flange: included \u003c\/li\u003e\n\u003cli\u003e\n\u003ca rel=\"noopener\" href=\"https:\/\/mtixtl.com\/search?q=Comparison+of+Alumina%2C+Mullite%2C+and+Quartz+Tube+of+Properties\u0026amp;options%5Bprefix%5D=last\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/thumb_65b67436-52ec-4a1d-835e-848319a7c172_100x100.jpg?v=1713462918\" alt=\"Quartz Tubes\"\u003e\u003c\/a\u003e       \u003ca rel=\"noopener\" href=\"fl-50kf25-ftd-m\" target=\"_blank\"\u003e\u003cimg title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/502final_100x100.jpg\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eAnti-corrosive Pressure Gauge\u003cbr\u003e\u003ca rel=\"noopener\" href=\"pgc554ld\" target=\"_blank\"\u003e\u003cimg title=\"Click to enlarge\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1.25_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e3.8x10\u003csup\u003e-5\u003c\/sup\u003e to 1125 Torr measurement range\u003c\/li\u003e\n\u003cli\u003eAnti-corrosive, gas-type independent \u003c\/li\u003e\n\u003cli\u003eHigh accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection\u003c\/li\u003e\n\u003cli\u003eFast atmospheric detection eliminates waiting time and shortens process cycle\u003c\/li\u003e\n\u003cli\u003eEasy to exchange plug \u0026amp; play sensor element\u003c\/li\u003e\n\u003cli\u003eClick the picture to view detail spec.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eOil-less Vacuum Pump Station and Valves\u003c\/div\u003e\n\u003cdiv\u003e \u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vacuum-M.jpg?v=1710004162\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vacuum-M_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003ePfeiffer's High Speed ( 226L\/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy duty mobile cart\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv\u003eKF25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve for customer's plug and play\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e10E-2 Torr vacuum can be achieved inside processing tube\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003e \u003cbr\u003eSliding mechanism\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSliding rail and screw are built in the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.\u003c\/li\u003e\n\u003cli\u003eSliding speed is adjustable from 0-70 mm\/s\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cbr\u003eHeating \u0026amp; Cooling Rates\u003ca href=\"http:\/\/www.mtixtl.com\/temperaturecontrolsystemforcontrollingmtisfurnacebyusingcomputereq-mts02.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-80SL-Plot.jpg?v=1706131614\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-80SL-Plot_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003eRS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from \u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/mts02?_pos=1\u0026amp;_psq=MTS02\u0026amp;_ss=e\u0026amp;_v=1.0\" target=\"_blank\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003ehere\u003c\/span\u003e\u003c\/a\u003e)\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv\u003eIn order to achieve Max. heating rate, the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv\u003eIn order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone\u003c\/div\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eHeating Rate:\u003c\/div\u003e\n\u003cdiv\u003e15°C\/sec (RT - 150°C);\u003c\/div\u003e\n\u003cdiv\u003e10°C\/sec (150°C - 250°C);\u003c\/div\u003e\n\u003cdiv\u003e7°C\/sec (250°C - 350°C);\u003c\/div\u003e\n\u003cdiv\u003e4°C\/sec (350°C - 500°C);\u003c\/div\u003e\n\u003cdiv\u003e3°C\/sec (350°C - 550°C);\u003c\/div\u003e\n\u003cdiv\u003e2°C\/sec (550°C - 650°C);\u003cbr\u003e1°C\/sec (650°C - 800°C);\u003cbr\u003e0.5°C\/sec (800°C - 1000°C);\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003eCooling Rate:\u003c\/div\u003e\n\u003cdiv\u003e15°C\/sec (1000 - 950°C);\u003c\/div\u003e\n\u003cdiv\u003e10°C\/sec (950°C - 900°C);\u003c\/div\u003e\n\u003cdiv\u003e7°C\/sec (900°C - 850°C);\u003c\/div\u003e\n\u003cdiv\u003e4°C\/sec (850°C - 750°C);\u003c\/div\u003e\n\u003cdiv\u003e2°C\/sec (750°C - 600°C);\u003cbr\u003e1.5°C\/sec (600°C - 500°C);\u003cbr\u003e1°C\/sec (500°C - 400°C);\u003cbr\u003e0.5°C\/sec (400°C - 300°C);\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eOptional\u003cbr\u003e\u003cstrong\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Flow4.png\"\u003e\u003cbr\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/Bubbler\/Evaporatorforliquidsourcesandchemicalprecursors-BL-SS.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTwo - Four precision mass flow meters (0.02% accuracy) with digital displays are available as options, which can replace the bottom case to control gas flow rate automatically with the system. Please click the picture below left to choose one at your budget.\u003c\/li\u003e\n\u003cli\u003eClick picture below - left to order bubbler or evaporator for CVD, and below right for \u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/search?q=Vacuum+%26+Pressure+Gauges+and+Controller\u0026amp;options%5Bprefix%5D=last\" target=\"_blank\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eConstant temperature control module\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003ca rel=\"noopener\" href=\"gsl-lcd\" target=\"_blank\"\u003e\u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sfdfsdfs_50x50.jpg\"\u003e\u003c\/a\u003e        \u003cstrong\u003e\u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Flow4.png?v=1706219579\" target=\"_blank\"\u003e\u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Flow4_50x50.png?ts=129931236595714663\"\u003e\u003c\/a\u003e       \u003c\/strong\u003e\u003ca rel=\"noopener\" href=\"bl-ss\" target=\"_blank\"\u003e\u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/bubbler082014_100x100.jpg\"\u003e\u003c\/a\u003e       \u003cstrong\u003e\u003ca rel=\"noopener\" href=\"lvd-f1\" target=\"_blank\"\u003e\u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4_100x100.jpg\"\u003e\u003c\/a\u003e        \u003ca rel=\"noopener\" href=\"kjt2v\" target=\"_blank\"\u003e\u003cimg title=\"\" style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Pressurecontroller_50x50.jpg\" border=\"0\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cbr\u003eOverall Dimensions\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003eFurnace: 550 x 380 x 520 mm \u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv\u003eSliding Rail: dual rail with 1750 mm length\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003eTwo Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.\u003c\/li\u003e\n\u003cli\u003eNet weight: 220 Lbs.\u003c\/li\u003e\n\u003cli\u003eShipping weight: 1200lbs.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eLaptop, software \u0026amp; WiFi Control (Optional)\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003cul\u003e\n\u003cli\u003eBrand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003cem\u003eLabview Based Temperature Control System (\u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/mts01?variant=44985106268299\u0026amp;_pos=1\u0026amp;_sid=328bc3f3f\u0026amp;_ss=r\" target=\"_blank\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eMTS01\u003c\/span\u003e\u003c\/a\u003e)\u003c\/em\u003e\u003c\/strong\u003eenables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.\u003c\/li\u003e\n\u003cli\u003eA wireless remote control provides up to 300 meters operating range.\u003c\/li\u003e\n\u003cli\u003eAbove features are available upon request at an extra cost (up to $1,000). Please contact us for more information.\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cstrong\u003e\u003cem\u003eNote: \u003cbr\u003e\u003c\/em\u003e\u003c\/strong\u003e\u003cem\u003eThe software is only compatible with MTI’s Yudian Temperature Controller\u003cbr\u003e\u003cbr\u003e\u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/wifi_GSL_OTF_bd021bfe-909d-4c51-9795-160125f3382a_100x100.jpg?v=1736202700\"\u003e      \u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/temperaturecontrolsystem1_fe5a229c-8bca-45aa-abbe-b5b938de0d58_100x100.jpg?v=1736202779\"\u003e\u003ca href=\"http:\/\/www.mti-kjgroup.com\/EQ-MTS01.aspx\"\u003e\u003c\/a\u003e\u003c\/em\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eCompliance\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eBuilt-in Pfeiffer's pump is ELT Certification\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003eCE Certified\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003eAll electric components ( \u0026gt;24V) are UL \/ MET \/ CSA certified\u003c\/li\u003e\n\u003cli\u003eThe furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.\u003cstrong\u003e （ please click marks below to learn details )\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv style=\"text-align: start;\"\u003eApplication Notes\u003cbr\u003e\u003ca rel=\"noopener\" href=\"cga580\" target=\"_blank\"\u003e\u003cimg title=\"\" style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQGRCGA580_d7ef201c-b5d1-44cd-8189-d6a70bc54de8_100x100.jpg?v=1713311009\" border=\"0\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/cga580?variant=44985116164235\u0026amp;_pos=1\u0026amp;_sid=6efd4e30e\u0026amp;_ss=r\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eClick here to learn the installation of a gas regulator\u003c\/a\u003e\u003c\/span\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eTube furnaces with quartz tubes are designed for using under vacuum and low pressure \u0026lt; 0.2 bars \/ 3 psi \/ 0.02 Mpa\u003c\/li\u003e\n\u003cli\u003e\n\u003cem\u003e\u003cstrong\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eAttention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.\u003c\/span\u003e \u003c\/strong\u003e\u003c\/em\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/cga580?variant=44985116164235\u0026amp;_pos=1\u0026amp;_sid=6efd4e30e\u0026amp;_ss=r\" target=\"_blank\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eClick here to learn the installation of a gas regulator.\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003cli\u003eThe flow rate for gasses should be limited to \u0026lt; 200 SCCM (or 200 ml\/min) for reducing thermal shocks to the tube\u003c\/li\u003e\n\u003cli\u003eVacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C\u003c\/li\u003e\n\u003cli\u003eClick here to learn \u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/howto-tube.pdf?v=1714583100\" target=\"_blank\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eHow to set up quartz\/ ceramic tube and vacuum flange for MTI Tube furnace.\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003cli\u003eMTI reserves the right to modify its PE-CVD design at any time without notice but promises quality in future designs meet and exceed the specifications above.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e,\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eHeating Rate:\u003c\/div\u003e\n\u003cdiv\u003e15°C\/sec (RT - 150°C);\u003c\/div\u003e\n\u003cdiv\u003e10°C\/sec (150°C - 250°C);\u003c\/div\u003e\n\u003cdiv\u003e7°C\/sec (250°C - 350°C);\u003c\/div\u003e\n\u003cdiv\u003e4°C\/sec (350°C - 500°C);\u003c\/div\u003e\n\u003cdiv\u003e3°C\/sec (350°C - 550°C);\u003c\/div\u003e\n\u003cdiv\u003e2°C\/sec (550°C - 650°C);\u003cbr\u003e1°C\/sec (650°C - 800°C);\u003cbr\u003e0.5°C\/sec (800°C - 1000°C);\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003eCooling Rate:\u003c\/div\u003e\n\u003cdiv\u003e15°C\/sec (1000 - 950°C);\u003c\/div\u003e\n\u003cdiv\u003e10°C\/sec (950°C - 900°C);\u003c\/div\u003e\n\u003cdiv\u003e7°C\/sec (900°C - 850°C);\u003c\/div\u003e\n\u003cdiv\u003e4°C\/sec (850°C - 750°C);\u003c\/div\u003e\n\u003cdiv\u003e2°C\/sec (750°C - 600°C);\u003cbr\u003e1.5°C\/sec (600°C - 500°C);\u003cbr\u003e1°C\/sec (500°C - 400°C);\u003cbr\u003e0.5°C\/sec (400°C - 300°C);\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984806146187,"sku":"OTF-1200X-ALD","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/OTF-1200X-ALD_b3f14264-4983-4758-8357-aee4126b5dd2.jpg?v=1764850830","url":"https:\/\/mtimalaysia.com\/products\/otf-1200x-ald","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}