{"product_id":"compact-auto-sliding-pecvd-furnace-w-2-tube-and-vacuum-pump-max-1200c-otf-1200x-s50-pesl","title":"Compact Auto-Sliding PECVD Furnace w\/ 2\" Tube and Vacuum Pump, Max. 1200C - OTF-1200X-S50-PESL","description":"\u003cdiv\u003eOTF-1200X-50S-PESL is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with a slideable mechanism. It consists of a 300W RF plasma generator, a 2\"O.D split tube furnace, and the integrated slidable rail which allows you to preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to an advanced model with options. It is an ideal tool for the researcher to make innovations under a limited budget.\u003c\/div\u003e\n\u003cblockquote dir=\"ltr\"\u003e\n\u003cul\u003e\n\u003cli\u003eLower temperature processing compared to conventional CVD. \u003c\/li\u003e\n\u003cli\u003eHigh heating \u0026amp; cooling rate using sliding furnace\u003c\/li\u003e\n\u003cli\u003eFilm stress can be controlled by high\/low frequency mixing techniques. \u003c\/li\u003e\n\u003cli\u003eControl over stoichiometry via process conditions.\u003c\/li\u003e\n\u003cli\u003eCan do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/blockquote\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eAuto-Sliding Split Tube furnace\u003c\/div\u003e\n\u003ca rel=\"noopener\" href=\"otf1200xsl50\" target=\"_blank\"\u003e\u003cimg title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF1200X50SLmain_100x100.jpg\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/CompactAuto-SlidingTubeFurnace-OTF-1200X-50-SL-UL.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\u003ca rel=\"noopener\" href=\"otf-1200x-s-ii\" target=\"_blank\"\u003e\u003cimg title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF1200XSII_100x100.png\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003e\u003cbr\u003etwo-zone heating is available upon request\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eInput power: 208 – 240V AC, 1.2kW\u003c\/li\u003e\n\u003cli\u003e1200°C Max. working temperature for \u0026lt; 60 minutes\u003c\/li\u003e\n\u003cli\u003e1100°C Max for continuous heating\u003c\/li\u003e\n\u003cli\u003eHigh purity quartz tube 2\"OD x 1.7\"ID x 39.4\" Length \u003c\/li\u003e\n\u003cli\u003e30 segments programmable precision digital temperature controller\u003c\/li\u003e\n\u003cli\u003e8\" (200mm), single-zone. 2.3\" (60mm) (+\/-1°C) @ 1000°C The following picture shows the temp. distribution across the heating zone, please click to enlarge.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Temp._Distribution_OTF-1200X-S.jpg\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Temp._Distribution_OTF-1200X-S_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003eTemp. distribution profile\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003ePlasma RF Generator\u003cbr\u003e\u003cbr\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eOutput Power: \u003cstrong\u003e5 -300W\u003c\/strong\u003e adjustable with ± 1% stability\u003c\/li\u003e\n\u003cli\u003eRF frequency: 13.56 MHz ±0.005% stability\u003c\/li\u003e\n\u003cli\u003eReflection Power: 200W max.\u003c\/li\u003e\n\u003cli\u003eMatching: Automatic\u003c\/li\u003e\n\u003cli\u003eRF Output Port: 50 Ω, N-type, female\u003c\/li\u003e\n\u003cli\u003eNoise: \u0026lt;50 dB. \u003c\/li\u003e\n\u003cli\u003ePower: 208-240VAC, 50\/60Hz\u003c\/li\u003e\n\u003cli\u003eCooling: Air cooling.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cbr\u003eVacuum Flanges and Fittings\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe vacuum flange set is made of stainless steel 304.\u003c\/li\u003e\n\u003cli\u003eLeft flange assembly includes a KF-25 vacuum port, two KF-25 quick clamps, a KF-25 right-angle valve, a KF-25 vacuum bellows, flange support, 3\/8 O.D barbed fitting, and a needle valve.\u003c\/li\u003e\n\u003cli\u003eRight flange assembly includes a digital Pirani gauge, 1\/4 O.D tube fitting, 1\/4\" feedthrough, a needle valve, and a KF-16 quick clamp set\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eVacuum Pump \u003cbr\u003e\u003ca rel=\"noopener\" href=\"ytp-550-ld\" target=\"_blank\"\u003e\u003cimg title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PumpFilter.final111_100x100.jpg\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e208 - 240V \/ 50-60 Hz (750W Max.)\u003c\/li\u003e\n\u003cli\u003e220 liters \/ M or 7.8 CFM\u003c\/li\u003e\n\u003cli\u003eOil Mist Eliminator is included\u003c\/li\u003e\n\u003cli\u003eMax. vacuum: 3 X 10E-3 torr\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cbr\u003eProduct Dimensions\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eOverall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H)\u003c\/li\u003e\n\u003cli\u003eNet weight: 350 lbs\u003c\/li\u003e\n\u003cli\u003eShipping weight: 480 lbs\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eOxygen Monitoring (Optional)\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003eAn Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:\u003cbr\u003e\u003ca rel=\"noopener\" href=\"w1000\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQW1000FT_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eOptions\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003ePlease choose below gas delivery systems based on your budget ( click underlined or picture to order )\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eLow-cost \u003ca rel=\"noopener\" href=\"CGM-3F-PTFE\" target=\"_blank\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eCompact Anti-Corrosion Three Channel Gas Mixer\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003cli style=\"color: rgb(43, 0, 255);\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca rel=\"noopener\" href=\"lvd-f1\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eCompact Liquid Vaporization Systems\u003c\/a\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003eFour Channels MFC-Gas Control System \u003c\/li\u003e\n\u003cli style=\"color: rgb(43, 0, 255);\"\u003e\n\u003ca rel=\"noopener\" href=\"https:\/\/mtixtl.com\/search?q=Vacuum+%26+Pressure+Gauges+and+Controller\u0026amp;options%5Bprefix%5D=last\" target=\"_blank\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/mtimalaysia.com\/search?type=product\u0026amp;q=Vacuum+%26+Pressure+Gauges+and+Controller\" target=\"_blank\" rel=\"noopener\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eConstant temperature controls module\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003ca rel=\"noopener\" href=\"bl-ss\" target=\"_blank\"\u003e\u003cimg title=\"\" style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/bl200STRUCTURE_100x100.jpg\" border=\"0\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/Bubbler\/Evaporatorforliquidsourcesandchemicalprecursors-BL-200.aspx\"\u003e\u003c\/a\u003e \u003ca rel=\"noopener\" href=\"cgm-3f-ptfe\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/3CPTFE_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e \u003ca rel=\"noopener\" href=\"lvd-f1\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e  \u003ca rel=\"noopener\" href=\"gsl-lcd\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/plcmfc_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e \u003ca rel=\"noopener\" href=\"kjt2v\" target=\"_blank\"\u003e\u003cimg title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Pressurecontroller_100x100.jpg\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003e\u003cbr\u003e\n\u003cul\u003e\n\u003cli\u003eThe \u003cstrong\u003eOTF-1200X-S50-PESL\u003c\/strong\u003e \u003cstrong\u003epackage adds gas mixing \u0026amp; delivery capabilities onto the furnace system by integrating \u003c\/strong\u003efour Channel Gas Mixing Station with PLC Touch Panel Control and Precision Mass Flow Meters. \u003cspan style=\"color: rgb(255, 42, 0);\"\u003ePlease select this model from the Product Options above.\u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_0113.jpg\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_0113_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e  \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_0120.jpg\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_0120_100x100.jpg\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cbr\u003eWarranty \u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003eOne-year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)\u003c\/div\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eLaptop, software \u0026amp; WiFi Control (Optional)\u003cbr\u003e\u003cem\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/wifi_GSL_OTF.jpg\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/wifi_GSL_OTF_50x50.jpg\" alt=\"\"\u003e\u003c\/a\u003e \u003ca rel=\"noopener\" href=\"MTS01\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/temperaturecontrolsystem1_50x50.jpg\" alt=\"\"\u003e\u003c\/a\u003e\u003c\/em\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eBrand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) \u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003cem\u003eLabview Based Temperature Control System (\u003ca href=\"https:\/\/mtimalaysia.com\/products\/mts01?_pos=1\u0026amp;_psq=MTS01\u0026amp;_ss=e\u0026amp;_v=1.0\" target=\"_blank\" rel=\"noopener\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eMTS01\u003c\/span\u003e\u003c\/a\u003e) \u003c\/em\u003e\u003c\/strong\u003eenables a user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.\u003c\/li\u003e\n\u003cli\u003eA wireless remote control provides up to 300 meters of operating range.\u003c\/li\u003e\n\u003cli\u003eThe above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003eCE Certified\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003eNRTL (UL61010), CSA or TUV certification is available upon request at extra cost.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eWarning \u0026amp; Note\u003cbr\u003e\u003cbr\u003e\u003ca rel=\"noopener\" href=\"cga580\" target=\"_blank\"\u003e\u003cimg title=\"\" style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQGRCGA580_100x100.jpg\" border=\"0\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca rel=\"noopener\" href=\"cga580\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eClick here to learn the installation of a gas regulator\u003c\/a\u003e\u003c\/span\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/twostagebrass0-100psianalyticalcylinderregulatorcga-580withneedlevalve-fa-y12244d580.aspx\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTube furnaces with quartz tubes are designed for use \u003cspan style=\"color: rgb(255, 42, 0);\"\u003eunder vacuum and low pressure \u0026lt; 0.2 bars \/ 3 psi.\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eVacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to\u0026lt;200 SCCM (or 200ml\/min) for reducing thermal shocks to the tube\u003c\/span\u003e\u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cem\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eAttention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.\u003c\/span\u003e\u003cstrong\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003e \u003c\/span\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/twostagebrass0-100psianalyticalcylinderregulatorcga-580withneedlevalve-fa-y12244d580.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/em\u003e\u003c\/li\u003e\n\u003cli\u003eMTI reserves the right to modify PECVD design at any time without notice but promise that quality will meet the specifications above\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"OTF-1200X-S50-PEC4-SL","offer_id":44984818499723,"sku":"OTF-1200X-S50-PEC4SL","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"OTF-1200X-S50-PESL","offer_id":44984818532491,"sku":"OTF1200XSPESL50","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/1200x50pesnew.jpg?v=1764850861","url":"https:\/\/mtimalaysia.com\/products\/compact-auto-sliding-pecvd-furnace-w-2-tube-and-vacuum-pump-max-1200c-otf-1200x-s50-pesl","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}