{"product_id":"5-rotary-tube-furnace-w-feeding-receiving-for-powder-pe-cvd-cleaning-otf-1200x-iii-r5-pecvd","title":"5\" Rotary Tube Furnace w\/ Feeding \u0026 Receiving for Powder PE-CVD \u0026 Cleaning - OTF-1200X-III-R5-PECVD","description":"\u003cdiv\u003eOTF-1200X-III-R5-PECVD is a 1200°C plasma-enhanced three-zone rotary furnace for chemical vapor deposition (PECVD). It is designed for powder surface coating, e.g. core-shell particles, and powder surface cleaning. With the automatic powder feeding and collection system, it can simulate the powder coating manufacturing process on lab-scale equipment.  I\u003cspan\u003et can also be used as plasma cleaning for powder\u003c\/span\u003e\n\u003c\/div\u003e\n\u003cdiv\u003e\u003cstrong\u003eFeatures\u003c\/strong\u003e\u003c\/div\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003ePlasma-enhanced CVD with 13.56 MHz RF power supply\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003eThree-zone rotary furnace with a heating length of 600 mm\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003eTumbling volume: 5000 ml. Effective volume @ 20-25%\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003e2-liter stainless steel powder feeding and collection system\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003eGas mixers with 4-channel MFCs \u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003eOptional PC and touchscreen remote control\u003c\/strong\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv\u003e \u003cbr\u003e\u003cstrong\u003eSPECIFICATIONS:\u003c\/strong\u003e\n\u003c\/div\u003e\n\u003ctable border=\"2\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 100%; height: 1886.26px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 194.734px;\"\u003e\n\u003ctd style=\"width: 18.8318%; height: 194.734px;\"\u003e\n\u003cdiv\u003ePower\u003cbr\u003e\u003cbr\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 81.1682%; height: 194.734px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eFurnace                 208-240VAC, single phase, 50\/60Hz, 4 kW\u003c\/li\u003e\n\u003cli\u003eRF power supply   208-240VAC, single phase, 50\/60Hz, 0.5 kW\u003c\/li\u003e\n\u003cli\u003ePowder feeder      24VDC, 120 VAC, or 208-240VAC, single phase, 50\/60Hz, 50W\u003c\/li\u003e\n\u003cli\u003eGas mixer             110-240VAC, single phase, 50\/60 Hz, 50 W\u003c\/li\u003e\n\u003cli\u003eVacuum pump (optional): power is dependent upon the pumping capacity.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 284.625px;\"\u003e\n\u003ctd style=\"width: 18.8318%; height: 284.625px;\"\u003e\n\u003cbr\u003e3-zone\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/otf1200xiiir5-af\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eRotary Furnace\u003c\/a\u003e\u003c\/span\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 81.1682%; height: 284.625px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eWorking temperature    \u003cspan lang=\"ZH-CN\"\u003e≤\u003c\/span\u003e1100ºC\u003c\/li\u003e\n\u003cli\u003eHeating rate                  \u003cspan lang=\"ZH-CN\"\u003e≤\u003c\/span\u003e10°C\/min\u003c\/li\u003e\n\u003cli\u003eHeating element             NiCrAl: Mo\u003c\/li\u003e\n\u003cli\u003eHeating length               600 mm  (150+300+150 mm three zones)\u003c\/li\u003e\n\u003cli\u003eTemperature control      PID temperature control\u003c\/li\u003e\n\u003cli\u003eTemp control accuracy   ±1°C\u003c\/li\u003e\n\u003cli\u003eRotary speed                  2-10 rpm\u003c\/li\u003e\n\u003cli\u003eTilting angle                   0-15°\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 229.625px;\"\u003e\n\u003ctd style=\"width: 18.8318%; height: 229.625px;\"\u003e\n\u003cdiv\u003eRotary Tube and Flange\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 81.1682%; height: 229.625px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eQuartz tube Ø60×Ø130×1650 mm with mixing blades\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/5tubePECVD.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/5tubePECVD.png\" width=\"63\" height=\"38\"\u003e\u003c\/a\u003e\u003cbr\u003e\n\u003cul\u003e\n\u003cli\u003eStainless steel magnetic fluid sealed swivels with gas inlet\/outlet and KF25 or KF40 vacuum port\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 340.922px;\"\u003e\n\u003ctd style=\"width: 18.8318%; height: 340.922px;\"\u003e\n\u003cdiv\u003ePlasma \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/rf-300i-ld\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eRF Power Supply\u003c\/a\u003e\u003c\/span\u003e\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PECVD3.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 81.1682%; height: 340.922px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eOutput Power             5 -300W adjustable with ± 1% stability.\u003c\/li\u003e\n\u003cli\u003eRF frequency              13.56 MHz ±0.005%\u003c\/li\u003e\n\u003cli\u003eAutomatic RF matching\u003c\/li\u003e\n\u003cli\u003eNoise: \u0026lt;50 dB.\u003c\/li\u003e\n\u003cli\u003eCooling: Air cooling.\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PECVD3.jpg\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PECVD3.jpg\" width=\"49\" height=\"37\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 319.234px;\"\u003e\n\u003ctd style=\"width: 18.8318%; height: 319.234px;\"\u003e\n\u003cdiv\u003e\n\u003cbr\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/gsl-lcd\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eGas Mixing Station\u003c\/a\u003e\u003c\/span\u003e\n\u003c\/div\u003e\n\u003cdiv\u003e\u003cbr\u003e\u003c\/div\u003e\n\u003cdiv\u003e\n\u003cstrong\u003e\u003cstrong\u003e\u003ca href=\"https:\/\/mtixtl.com\/products\/gsl-lcd?_pos=2\u0026amp;_sid=a478fb79b\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/plcmfc_100x100.jpg\"\u003e\u003c\/a\u003e \u003c\/strong\u003e\u003c\/strong\u003e\u003cstrong\u003e\u003cstrong\u003e \u003c\/strong\u003e\u003c\/strong\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 81.1682%; height: 319.234px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eGSL-4Z-LCD\u003c\/li\u003e\n\u003cli\u003eTouchscreen LCD monitor\u003c\/li\u003e\n\u003cli\u003eFour mass flow controllers\n\u003cul\u003e\n\u003cli\u003eMFC 1      1-500 sccm oxygen\u003c\/li\u003e\n\u003cli\u003eMFC 2      1-500 sccm nitrogen\u003c\/li\u003e\n\u003cli\u003eMFC 3      1-500 sccm hydrogen\u003c\/li\u003e\n\u003cli\u003eMFC 4      1-500 sccm argon\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003cli\u003eAccuracy             ±1.5% F.S.\u003c\/li\u003e\n\u003cli\u003ePort size             1\/4\" compression tube fitting\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 277.406px;\"\u003e\n\u003ctd style=\"width: 18.8318%; height: 277.406px;\"\u003e\n\u003cdiv\u003e\n\u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/pf1s\" target=\"_blank\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003ePowder Feeder\u003c\/span\u003e\u003c\/a\u003e and Collection Tank \u003c\/div\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/products\/pf-1s?_pos=1\u0026amp;_sid=f01a63a21\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQPF1SRight.1_100x100.jpg\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/mtixtl.com\/products\/pf-1s?_pos=1\u0026amp;_sid=b5eb966f5\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-II-PEC4-collector_100x100.jpg\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-II-PEC4-collector.jpg\"\u003e\u003cbr\u003e\u003c\/a\u003e \u003c\/td\u003e\n\u003ctd style=\"width: 81.1682%; height: 277.406px;\"\u003e\n\u003cul\u003e\n\u003cli\u003ePowder feeder PF-1S, a motorized stainless steel powder feeder with built-in vibration.\u003c\/li\u003e\n\u003cli\u003eThe estimated feeding rate is about 0- 97 ml\/minute. \u003c\/li\u003e\n\u003cli\u003eA stainless steel collection tank ( 2 Liter capacity ) is to collect powder without exposure to air. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 104.859px;\"\u003e\n\u003ctd style=\"width: 18.8318%; height: 104.859px;\"\u003e\n\u003cdiv\u003eLaptop, software Control (Optional)\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 81.1682%; height: 104.859px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThe software will integrate temperature control, gas MFC control, and Plasma control for remote operation\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 134.859px;\"\u003e\n\u003ctd style=\"width: 18.8318%; height: 134.859px;\"\u003e\n\u003cdiv\u003eCompliance\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 81.1682%; height: 134.859px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE Certified\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cstrong\u003e\u003cbr\u003e\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984818106507,"sku":"OTF1200XIIIR5-PECVD","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/OTF1200XIIIR5-PECVD-MAIN.jpg?v=1764850859","url":"https:\/\/mtimalaysia.com\/products\/5-rotary-tube-furnace-w-feeding-receiving-for-powder-pe-cvd-cleaning-otf-1200x-iii-r5-pecvd","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}