{"product_id":"1600-c-max-mist-lpcvd-system-up-to-6-wafer-mist-1600-6","title":"1600°C Max. MIST\/LPCVD System up to 6\" Wafer - MIST-1600-6","description":"\u003cp\u003eMIST-1600-6 is a MIST\/LPCVD system designed for the epitaxial growth of thin films on various substrates up to 1600°C heated by induction. It features an induction-heated graphite substrate holder with precise PID control. The boron nitride (BN) shower head enables a uniform deposition of precursors on a substrate at an elevated temperature. The system also comes with a hermetic quartz chamber for LPCVD without worries of precursor leaks. It is a unique tool for high-temperature thin film growth, especially for next-generation semiconductors, such as Ga2O3 and BN.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS: \u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" class=\"MsoNormalTable\" style=\"border: 1px solid #0099cc;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cp\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003ePower\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; border: 1px solid #0099cc; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e208-240 VAC, 50\/60 Hz, 3 phase\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-size: small;\"\u003e15 kW\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-size: small;\"\u003eA 10-foot power cord is included. The power plug is not covered\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984808964235,"sku":"MIST-1600-6","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/2021120116112812.1_fc5a9328-4276-46d6-a9a1-d460c4c3706a.jpg?v=1764850840","url":"https:\/\/mtimalaysia.com\/products\/1600-c-max-mist-lpcvd-system-up-to-6-wafer-mist-1600-6","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}